Yasuhiko Nakayama

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of semiconductor substrate and method and appa...
- Patent number 7,460,220
- Issue date Dec 2, 2008
- Renesas Technology Corporation
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for picking up 2D image of an object to be sensed
- Patent number 7,221,486
- Issue date May 22, 2007
- Hitachi, Ltd.
- Hiroshi Makihira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Manufacturing method of semiconductor substrate and method and appa...
- Patent number 7,180,584
- Issue date Feb 20, 2007
- Renesas Technology Corp.
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Manufacturing method of semiconductor substrate and method and appa...
- Patent number 7,061,600
- Issue date Jun 13, 2006
- Renesas Technology Corp.
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and apparatus therefor
- Patent number 6,674,890
- Issue date Jan 6, 2004
- Hitachi, Ltd.
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for picking up 2D image of an object to be sensed
- Patent number 6,507,417
- Issue date Jan 14, 2003
- Hitachi, Ltd.
- Hiroshi Makihira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Manufacturing method of semiconductor substrate and method and appa...
- Patent number 6,404,498
- Issue date Jun 11, 2002
- Hitachi, Ltd.
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Manufacturing method of semiconductor substrate and method and appa...
- Patent number 6,263,099
- Issue date Jul 17, 2001
- Hitachi, Ltd.
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and apparatus therefor
- Patent number 6,169,282
- Issue date Jan 2, 2001
- Hitachi, Ltd.
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic focus detection method, automatic focus detection apparat...
- Patent number 6,091,075
- Issue date Jul 18, 2000
- Hitachi, Ltd.
- Yukihiro Shibata
- G02 - OPTICS
Information Patent Grant
Manufacturing method of semiconductor substrative and method and ap...
- Patent number 5,774,222
- Issue date Jun 30, 1998
- Hitachi, Ltd.
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Controlling method of forming thin film, system for said controllin...
- Patent number 5,747,201
- Issue date May 5, 1998
- Hitachi, Ltd.
- Yasuhiko Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for pattern exposure, mask used therefor, and...
- Patent number 5,677,755
- Issue date Oct 14, 1997
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controlling method of forming thin film, system for said controllin...
- Patent number 5,409,538
- Issue date Apr 25, 1995
- Hitachi, Ltd.
- Yasuhiko Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reduced-projection exposure system with chromatic aberration correc...
- Patent number 5,324,953
- Issue date Jun 28, 1994
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Manufacturing method of semiconductor substrate and method and appa...
- Publication number 20070070336
- Publication date Mar 29, 2007
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Application
Manufacturing method of semiconductor substrate and method and appa...
- Publication number 20040075837
- Publication date Apr 22, 2004
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for picking up 2D image of an object to be sensed
- Publication number 20030030853
- Publication date Feb 13, 2003
- Hiroshi Makihira
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Manufacturing method of semiconductor substrate and method and appa...
- Publication number 20020154303
- Publication date Oct 24, 2002
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection method and apparatus therefor
- Publication number 20020031248
- Publication date Mar 14, 2002
- Shunji Maed
- G01 - MEASURING TESTING

Yasuhiko Nakayama

Person

Patents Grantslast 30 patents

Manufacturing method of semiconductor substrate and method and appa...

Method and apparatus for picking up 2D image of an object to be sensed

Manufacturing method of semiconductor substrate and method and appa...

Manufacturing method of semiconductor substrate and method and appa...

Defect inspection method and apparatus therefor

Method and apparatus for picking up 2D image of an object to be sensed

Manufacturing method of semiconductor substrate and method and appa...

Manufacturing method of semiconductor substrate and method and appa...

Defect inspection method and apparatus therefor

Automatic focus detection method, automatic focus detection apparat...

Manufacturing method of semiconductor substrative and method and ap...

Controlling method of forming thin film, system for said controllin...

Method and apparatus for pattern exposure, mask used therefor, and...

Controlling method of forming thin film, system for said controllin...

Reduced-projection exposure system with chromatic aberration correc...

Patents Applicationslast 30 patents

Manufacturing method of semiconductor substrate and method and appa...

Manufacturing method of semiconductor substrate and method and appa...

Method and apparatus for picking up 2D image of an object to be sensed

Manufacturing method of semiconductor substrate and method and appa...

Defect inspection method and apparatus therefor