Yasuhiko Nara

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 11,977,099
- Issue date May 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Tomohisa Ohtaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Evaluation apparatus for semiconductor device
- Patent number 11,709,199
- Issue date Jul 25, 2023
- HITACHI HIGH-TECH CORPORATION
- Tomohisa Ohtaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Probe module and probe
- Patent number 11,391,756
- Issue date Jul 19, 2022
- HITACHI HIGH-TECH CORPORATION
- Ryo Hirano
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic response analysis prober device
- Patent number 10,782,340
- Issue date Sep 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Masaaki Komori
- G02 - OPTICS
Information Patent Grant
Circuit inspection method and sample inspection apparatus
- Patent number 10,712,384
- Issue date Jul 14, 2020
- HITACHI HIGH-TECH CORPORATION
- Akira Kageyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection device
- Patent number 8,816,712
- Issue date Aug 26, 2014
- Hitachi High-Technologies Corporation
- Mitsuhiro Nakamura
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and device
- Patent number 8,754,664
- Issue date Jun 17, 2014
- Hitachi High-Technologies Corporation
- Yasuhiko Nara
- G01 - MEASURING TESTING
Information Patent Grant
Logical CAD navigation for device characteristics evaluation system
- Patent number 8,178,837
- Issue date May 15, 2012
- Hitachi High-Technologies Corporation
- Tohru Ando
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Specimen inspection equipment and how to make the electron beam abs...
- Patent number 8,178,840
- Issue date May 15, 2012
- Hitachi High-Technologies Corporation
- Tomoharu Obuki
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor testing method and semiconductor tester
- Patent number 8,067,752
- Issue date Nov 29, 2011
- Hitachi High-Technologies Corporation
- Tohru Ando
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection apparatus
- Patent number 7,989,766
- Issue date Aug 2, 2011
- Hitachi High-Technologies Corporation
- Yasuhiko Nara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,957,579
- Issue date Jun 7, 2011
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,894,658
- Issue date Feb 22, 2011
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Probe storage container, prober apparatus, probe arranging method a...
- Patent number 7,875,156
- Issue date Jan 25, 2011
- Hitachi High-Technologies Corporation
- Masanori Gunji
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,855,363
- Issue date Dec 21, 2010
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor testing method and semiconductor tester
- Patent number 7,732,791
- Issue date Jun 8, 2010
- Hitachi High-Technologies Corporation
- Tohru Ando
- G01 - MEASURING TESTING
Information Patent Grant
Logical CAD navigation for device characteristics evaluation system
- Patent number 7,700,916
- Issue date Apr 20, 2010
- Hitachi High-Technologies Corporation
- Tohru Ando
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Specimen inspection equipment and how to make electron beam absorbe...
- Patent number 7,663,104
- Issue date Feb 16, 2010
- Hitachi High-Technologies Corporation
- Tomoharu Obuki
- G01 - MEASURING TESTING
Information Patent Grant
Circuit-pattern inspection apparatus
- Patent number 7,532,328
- Issue date May 12, 2009
- Hitachi High-Technologies Corporation
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,457,453
- Issue date Nov 25, 2008
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,425,704
- Issue date Sep 16, 2008
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuit-pattern inspection apparatus
- Patent number 7,292,327
- Issue date Nov 6, 2007
- Hitachi High-Technologies Corporation
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and its apparatus for inspecting a pattern
- Patent number 7,269,280
- Issue date Sep 11, 2007
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,266,235
- Issue date Sep 4, 2007
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus for circuit pattern
- Patent number 7,223,975
- Issue date May 29, 2007
- Hitachi, Ltd.
- Yasuhiko Nara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,133,550
- Issue date Nov 7, 2006
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspecting apparatus
- Patent number 7,129,727
- Issue date Oct 31, 2006
- Hitachi High-Technologies Corporation
- Tsutomu Saito
- G01 - MEASURING TESTING
Information Patent Grant
Circuit pattern inspection method and its apparatus
- Patent number 7,071,468
- Issue date Jul 4, 2006
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspecting a specimen
- Patent number 7,049,587
- Issue date May 23, 2006
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,034,298
- Issue date Apr 25, 2006
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Probe Device
- Publication number 20240288472
- Publication date Aug 29, 2024
- Hitachi High-Tech Corporation
- Naoki SAMURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Sample Inspection Apparatus
- Publication number 20240255556
- Publication date Aug 1, 2024
- Hitachi High-Tech Corporation
- Tomoko SHIMAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Manufacturing Semiconductor Device
- Publication number 20210048450
- Publication date Feb 18, 2021
- Hitachi High-Tech Corporation
- Tomohisa OHTAKI
- G01 - MEASURING TESTING
Information Patent Application
Probe Module and Probe
- Publication number 20210033642
- Publication date Feb 4, 2021
- Hitachi High-Tech Corporation
- Ryo HIRANO
- G01 - MEASURING TESTING
Information Patent Application
Evaluation Apparatus for Semiconductor Device
- Publication number 20210025936
- Publication date Jan 28, 2021
- Hitachi High-Tech Corporation
- Tomohisa OHTAKI
- G01 - MEASURING TESTING
Information Patent Application
Dynamic Response Analysis Prober Device
- Publication number 20180299504
- Publication date Oct 18, 2018
- Hitachi High-Technologies Corporation
- Masaaki KOMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCUIT INSPECTION METHOD AND SAMPLE INSPECTION APPARATUS
- Publication number 20180246166
- Publication date Aug 30, 2018
- Hitachi High-Technologies Corporation
- Akira KAGEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Specimen Testing Device and Method for Creating Absorbed Current Image
- Publication number 20130119999
- Publication date May 16, 2013
- Hitachi High-Technologies Corporation
- Tomoharu Obuki
- G01 - MEASURING TESTING
Information Patent Application
Inspection Method and Device
- Publication number 20130112871
- Publication date May 9, 2013
- Yasuhiko Nara
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20110140729
- Publication date Jun 16, 2011
- Hitachi High-Technologies Corporation
- Mitsuhiro Nakamura
- G01 - MEASURING TESTING
Information Patent Application
Probe Storage Container, Prober Apparatus, Probe Arranging Method a...
- Publication number 20110093991
- Publication date Apr 21, 2011
- Hitachi High-Technologies Corporation
- Masanori Gunji
- G01 - MEASURING TESTING
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20100246933
- Publication date Sep 30, 2010
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Semiconductor Testing Method and Semiconductor Tester
- Publication number 20100200749
- Publication date Aug 12, 2010
- Hitachi High-Technologies Corporation
- Tohru ANDO
- G01 - MEASURING TESTING
Information Patent Application
LOGICAL CAD NAVIGATION FOR DEVICE CHARACTERISTICS EVALUATION SYSTEM
- Publication number 20100177954
- Publication date Jul 15, 2010
- Hitachi High-Technologies Corporation
- Tohru ANDO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Specimen Inspection Equipment and How to Make the Electron Beam Abs...
- Publication number 20100116986
- Publication date May 13, 2010
- Hitachi High-Technologies Corporation
- Tomoharu OBUKI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS FOR CIRCUIT PATTERN
- Publication number 20100019148
- Publication date Jan 28, 2010
- Hitachi High-Technologies Corporation
- Yasuhiko Nara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE INSPECTION APPARATUS
- Publication number 20090250610
- Publication date Oct 8, 2009
- Hitachi High-Technologies Corporation
- Yasuhiko NARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20090045338
- Publication date Feb 19, 2009
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Testing Method and Semiconductor Tester
- Publication number 20080237462
- Publication date Oct 2, 2008
- Hitachi High-Technologies Corporation
- Tohru ANDO
- G01 - MEASURING TESTING
Information Patent Application
Specimen Inspection Equipment and How to Make the Electron Beam Abs...
- Publication number 20080203297
- Publication date Aug 28, 2008
- Hitachi High-Technologies Corporation
- Tomoharu OBUKI
- G01 - MEASURING TESTING
Information Patent Application
Probe Storage Container, Prober Apparatus, Probe Arranging Method a...
- Publication number 20080204058
- Publication date Aug 28, 2008
- Hitachi High-Technologies Corporation
- Masanori GUNJI
- G01 - MEASURING TESTING
Information Patent Application
Circuit-pattern inspection apparatus
- Publication number 20080174772
- Publication date Jul 24, 2008
- Hitachi, Ltd
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20080063257
- Publication date Mar 13, 2008
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20080056559
- Publication date Mar 6, 2008
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND ITS APPARATUS FOR INSPECTING A PATTERN
- Publication number 20080002876
- Publication date Jan 3, 2008
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection apparatus for circuit pattern
- Publication number 20070284526
- Publication date Dec 13, 2007
- Hitachi High-Technologies Corporation
- Yasuhiko Nara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTION METHOD AND APPARATUS
- Publication number 20070269101
- Publication date Nov 22, 2007
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern inspection method and system therefor
- Publication number 20070131877
- Publication date Jun 14, 2007
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Logical CAD navigation for device characteristics evaluation system
- Publication number 20070124713
- Publication date May 31, 2007
- Tohru Ando
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20060192117
- Publication date Aug 31, 2006
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS

Yasuhiko Nara

Person

Patents Grantslast 30 patents

Method for manufacturing semiconductor device

Evaluation apparatus for semiconductor device

Probe module and probe

Dynamic response analysis prober device

Circuit inspection method and sample inspection apparatus

Inspection device

Inspection method and device

Logical CAD navigation for device characteristics evaluation system

Specimen inspection equipment and how to make the electron beam abs...

Semiconductor testing method and semiconductor tester

Sample inspection apparatus

Pattern inspection method and apparatus

Pattern inspection method and apparatus

Probe storage container, prober apparatus, probe arranging method a...

Inspection method and apparatus using an electron beam

Semiconductor testing method and semiconductor tester

Logical CAD navigation for device characteristics evaluation system

Specimen inspection equipment and how to make electron beam absorbe...

Circuit-pattern inspection apparatus

Pattern inspection method and apparatus

Inspection method and apparatus using an electron beam

Circuit-pattern inspection apparatus

Method and its apparatus for inspecting a pattern

Pattern inspection method and apparatus

Inspection apparatus for circuit pattern

Pattern inspection method and apparatus

Defect inspecting apparatus

Circuit pattern inspection method and its apparatus

Apparatus for inspecting a specimen

Inspection method and apparatus using an electron beam

Patents Applicationslast 30 patents

Probe Device

Sample Inspection Apparatus

Method for Manufacturing Semiconductor Device

Probe Module and Probe

Evaluation Apparatus for Semiconductor Device

Dynamic Response Analysis Prober Device

CIRCUIT INSPECTION METHOD AND SAMPLE INSPECTION APPARATUS

Specimen Testing Device and Method for Creating Absorbed Current Image

Inspection Method and Device

INSPECTION DEVICE

Probe Storage Container, Prober Apparatus, Probe Arranging Method a...

Pattern Inspection Method And Apparatus

Semiconductor Testing Method and Semiconductor Tester

LOGICAL CAD NAVIGATION FOR DEVICE CHARACTERISTICS EVALUATION SYSTEM

Specimen Inspection Equipment and How to Make the Electron Beam Abs...

INSPECTION APPARATUS FOR CIRCUIT PATTERN

SAMPLE INSPECTION APPARATUS

Inspection method and apparatus using an electron beam

Semiconductor Testing Method and Semiconductor Tester

Specimen Inspection Equipment and How to Make the Electron Beam Abs...

Probe Storage Container, Prober Apparatus, Probe Arranging Method a...

Circuit-pattern inspection apparatus

Pattern Inspection Method And Apparatus

Pattern Inspection Method And Apparatus

METHOD AND ITS APPARATUS FOR INSPECTING A PATTERN

Inspection apparatus for circuit pattern

PATTERN INSPECTION METHOD AND APPARATUS

Pattern inspection method and system therefor

Logical CAD navigation for device characteristics evaluation system

Inspection method and apparatus using an electron beam