Yasuhiko Nishinakayama

Follow

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate positioning device, substrate positioning method and program
- Patent number 7,672,502
- Issue date Mar 2, 2010
- Tokyo Electron Limited
- Keiji Osada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier system positioning method
- Patent number 6,510,365
- Issue date Jan 21, 2003
- Tokyo Electron Limited
- Yasuhiko Nishinakayama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate positioning device, substrate positioning method and program
- Publication number 20060222236
- Publication date Oct 5, 2006
- TOKYO ELECTRON LIMITED
- Keiji Osada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY