Yasuhiko Ozawa

Person

Abikoi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning electron microscope
- Patent number 8,666,165
- Issue date Mar 4, 2014
- Hitachi, Ltd.
- Satoru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting method, inspecting system, and method for manufacturing...
- Patent number 8,428,336
- Issue date Apr 23, 2013
- Hitachi, Ltd.
- Yoko Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,263,935
- Issue date Sep 11, 2012
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope for determining quality of a semicondu...
- Patent number 8,188,429
- Issue date May 29, 2012
- Hitachi High-Technologies Corporation
- Yasuhiko Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,652,249
- Issue date Jan 26, 2010
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam alignment method and charged particle beam ap...
- Patent number 7,605,381
- Issue date Oct 20, 2009
- Hitachi, Ltd.
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,439,505
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect image classifying method and apparatus and a semiconductor d...
- Patent number 7,356,177
- Issue date Apr 8, 2008
- Hitachi, Ltd.
- Kenji Obara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for analyzing circuit pattern defects and a system thereof
- Patent number 7,352,890
- Issue date Apr 1, 2008
- Hitachi, Ltd.
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor inspection system
- Patent number 7,235,782
- Issue date Jun 26, 2007
- Hitachi, Ltd.
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection method
- Patent number 7,181,060
- Issue date Feb 20, 2007
- Hitachi, Ltd.
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining depression/protrusion of sample and charged...
- Patent number 7,166,840
- Issue date Jan 23, 2007
- Hitachi, Ltd.
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspecting method, inspecting system, and method for manufacturing...
- Patent number 7,068,834
- Issue date Jun 27, 2006
- Hitachi, Ltd.
- Yoko Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for analyzing circuit pattern defects
- Patent number 7,062,081
- Issue date Jun 13, 2006
- Hitachi, Ltd.
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor inspection system
- Patent number 7,026,615
- Issue date Apr 11, 2006
- Hitachi, Ltd.
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 7,002,151
- Issue date Feb 21, 2006
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining depression/protrusion of sample and charged...
- Patent number 6,872,943
- Issue date Mar 29, 2005
- Hitachi, Ltd.
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam alignment method and charged particle beam ap...
- Patent number 6,864,493
- Issue date Mar 8, 2005
- Hitachi, Ltd.
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 6,803,573
- Issue date Oct 12, 2004
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for observing specimen and device therefor
- Patent number 6,756,589
- Issue date Jun 29, 2004
- Hitachi, Ltd.
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 6,627,888
- Issue date Sep 30, 2003
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and its apparatus for inspecting a specimen
- Patent number 6,553,323
- Issue date Apr 22, 2003
- Hitachi, Ltd.
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope having magnification switching control
- Patent number 6,476,388
- Issue date Nov 5, 2002
- Hitachi, Ltd.
- Ryo Nakagaki
- G01 - MEASURING TESTING
Information Patent Grant
NMR imaging method
- Patent number RE34495
- Issue date Jan 4, 1994
- Hitachi, Ltd.
- Koichi Sano
- 128 - Surgery
Information Patent Grant
NMR imaging method
- Patent number 4,844,077
- Issue date Jul 4, 1989
- Hitachi, Ltd.
- Koichi Sano
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20100102224
- Publication date Apr 29, 2010
- Hitachi High-Technologies Corporation
- Atsushi TAKANE
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM AP...
- Publication number 20100006755
- Publication date Jan 14, 2010
- Mitsugo Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090041333
- Publication date Feb 12, 2009
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090032710
- Publication date Feb 5, 2009
- Hitachi High-Technologies Corporation
- Yasuhiko OZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20080073526
- Publication date Mar 27, 2008
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor inspection system
- Publication number 20070194236
- Publication date Aug 23, 2007
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspecting method, inspecting system, and method for manufacturing...
- Publication number 20060274932
- Publication date Dec 7, 2006
- Yoko Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for analyzing circuit pattern defects and a system thereof
- Publication number 20060140472
- Publication date Jun 29, 2006
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning electron microscope
- Publication number 20060097158
- Publication date May 11, 2006
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for determining depression/protrusion of sample and charged...
- Publication number 20050151078
- Publication date Jul 14, 2005
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20050109937
- Publication date May 26, 2005
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam alignment method and charged particle beam ap...
- Publication number 20040124364
- Publication date Jul 1, 2004
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope
- Publication number 20040016882
- Publication date Jan 29, 2004
- Hitachi, Ltd,
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Semiconductor inspection system
- Publication number 20030173516
- Publication date Sep 18, 2003
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Defect inspection method
- Publication number 20030015659
- Publication date Jan 23, 2003
- Hitachi, Ltd
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Application
Method for determining depression/protrusion of sample and charged...
- Publication number 20030010914
- Publication date Jan 16, 2003
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam alignment method and charged particle beam ap...
- Publication number 20020179851
- Publication date Dec 5, 2002
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor inspection system
- Publication number 20020158199
- Publication date Oct 31, 2002
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for classifying defects and device for the same
- Publication number 20010042705
- Publication date Nov 22, 2001
- Ryou Nakagaki
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope
- Publication number 20010019109
- Publication date Sep 6, 2001
- Hitachi, Ltd.
- Satoru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Method for analyzing circuit pattern defects and a system thereof
- Publication number 20010016061
- Publication date Aug 23, 2001
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING

Yasuhiko Ozawa

Person

Patents Grantslast 30 patents

Scanning electron microscope

Inspecting method, inspecting system, and method for manufacturing...

Charged particle beam apparatus

Scanning electron microscope for determining quality of a semicondu...

Charged particle beam apparatus

Charged particle beam alignment method and charged particle beam ap...

Scanning electron microscope

Defect image classifying method and apparatus and a semiconductor d...

Method for analyzing circuit pattern defects and a system thereof

Semiconductor inspection system

Defect inspection method

Method for determining depression/protrusion of sample and charged...

Inspecting method, inspecting system, and method for manufacturing...

Method and system for analyzing circuit pattern defects

Semiconductor inspection system

Scanning electron microscope

Method for determining depression/protrusion of sample and charged...

Charged particle beam alignment method and charged particle beam ap...

Scanning electron microscope

Method for observing specimen and device therefor

Scanning electron microscope

Method and its apparatus for inspecting a specimen

Scanning electron microscope having magnification switching control

NMR imaging method

NMR imaging method

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM AP...

SCANNING ELECTRON MICROSCOPE

SCANNING ELECTRON MICROSCOPE

Charged particle beam apparatus

Semiconductor inspection system

Inspecting method, inspecting system, and method for manufacturing...

Method for analyzing circuit pattern defects and a system thereof

Scanning electron microscope

Method for determining depression/protrusion of sample and charged...

Scanning electron microscope

Charged particle beam alignment method and charged particle beam ap...

Scanning electron microscope

Semiconductor inspection system

Defect inspection method

Method for determining depression/protrusion of sample and charged...

Charged particle beam alignment method and charged particle beam ap...

Semiconductor inspection system

Method for classifying defects and device for the same

Scanning electron microscope

Method for analyzing circuit pattern defects and a system thereof