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Vacuum pump with abatement function
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Patent number 10,632,419
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Issue date Apr 28, 2020
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Ebara Corporation
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Toshiharu Nakazawa
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Vacuum pump with abatement function
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Patent number 10,143,964
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Issue date Dec 4, 2018
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Ebara Corporation
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Kohtaro Kawamura
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Vacuum pump with abatement function
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Patent number 9,956,524
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Issue date May 1, 2018
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Ebara Corporation
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Toshiharu Nakazawa
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Vacuum pump with abatement function
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Patent number 9,822,974
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Issue date Nov 21, 2017
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Ebara Corporation
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Kohtaro Kawamura
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Exhaust gas abatement apparatus
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Patent number 9,364,786
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Issue date Jun 14, 2016
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Ebara Corporation
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Kohtaro Kawamura
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Communication apparatus
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Patent number 7,383,023
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Issue date Jun 3, 2008
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Hitachi Kokusai Electric Inc.
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Takayuki Hirano
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H03 - BASIC ELECTRONIC CIRCUITRY