Yasuhiko Tsukanaka

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Conditioning method and conditioning apparatus for polishing pad fo...
- Patent number 8,579,679
- Issue date Nov 12, 2013
- Sumco Corporation
- Hiroto Fukushima
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
GRINDING METHOD AND GRINDING APPARATUS FOR POLISHING PAD FOR USE IN...
- Publication number 20110065365
- Publication date Mar 17, 2011
- SUMCO CORPORATION
- Hiroto Fukushima
- B24 - GRINDING POLISHING