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Yasuhiro Chiba
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Sendai, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for controlling gas system
Patent number
6,167,323
Issue date
Dec 26, 2000
Tokyo Electron Limited
Mitsuaki Komino
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for controlling pressure and flow rate
Patent number
6,131,307
Issue date
Oct 17, 2000
Tokyo Electron Limited
Mitsuaki Komino
F26 - DRYING
Patents Applications
last 30 patents
Information
Patent Application
Valve Device for Controlling and Adjusting Fluid Passage
Publication number
20170016544
Publication date
Jan 19, 2017
HAM-LET (ISRAEL - CANADA) LTD.
Yasuhiro CHIBA
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
HIGHLY CLEAN AND HOT VALVE
Publication number
20120001102
Publication date
Jan 5, 2012
TOKYO ELECTRON LIMITED
Yasuhiro Chiba
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Eccentric type rotary valve
Publication number
20050269545
Publication date
Dec 8, 2005
Yasuhiro Chiba
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
Integration unit
Publication number
20020117221
Publication date
Aug 29, 2002
Osamu Uchizawa
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...