Yasuhiro Chouno

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Tosu-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 8,978,670
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Junya Minamida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 7,445,689
- Issue date Nov 4, 2008
- Tokyo Electron Limited
- Masahiro Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device
- Patent number 7,180,035
- Issue date Feb 20, 2007
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,086,410
- Issue date Aug 8, 2006
- Tokyo Electron Limited
- Yasuhiro Chouno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pneumatically driven liquid supply apparatus
- Patent number 6,186,171
- Issue date Feb 13, 2001
- Tokyo Electron Limited
- Hiroshi Tanaka
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Grant
Substrates-washing apparatus
- Patent number 5,503,171
- Issue date Apr 2, 1996
- Tokyo Electron Limited
- Kenji Yokomizo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110079252
- Publication date Apr 7, 2011
- TOKYO ELECTRON LIMITED
- Junya MINAMIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing device
- Publication number 20060110143
- Publication date May 25, 2006
- TOKYO ELECTRON LIMITED
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing container
- Publication number 20060102210
- Publication date May 18, 2006
- Yasuhiro Chouno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing system
- Publication number 20040069226
- Publication date Apr 15, 2004
- TOKYO ELECTRON LIMITED
- Masahiro Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030170949
- Publication date Sep 11, 2003
- TOKYO ELECTRON LIMITED
- Yasuhiro Chouno
- H01 - BASIC ELECTRIC ELEMENTS