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Yasuhiro Fujiwara
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Stage apparatus, exposure apparatus, and device manufacturing method
Patent number
7,952,686
Issue date
May 31, 2011
Canon Kabushiki Kaisha
Yasuhiro Fujiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,307,698
Issue date
Dec 11, 2007
Canon Kabushiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Publication number
20080259309
Publication date
Oct 23, 2008
Canon Kabushiki Kaisha
Yasuhiro Fujiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus, and device manufacturing method
Publication number
20060209289
Publication date
Sep 21, 2006
Canon Kabushiki Kaisha
Yasuhiro Fujiwara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20050185166
Publication date
Aug 25, 2005
Canon Kabushiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY