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Hitachiota, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Circuit pattern inspecting apparatus, management system including c...
Patent number
8,565,509
Issue date
Oct 22, 2013
Hitachi High-Technologies Corporation
Hiroyuki Takahashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam device for scanning a sample using a charged...
Patent number
8,421,010
Issue date
Apr 16, 2013
Hitachi High-Technologies Corporation
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device inspection apparatus
Patent number
8,242,443
Issue date
Aug 14, 2012
Hitachi High-Technologies Corporation
Yusuke Ominami
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam apparatus
Patent number
8,207,513
Issue date
Jun 26, 2012
Hitachi High-Technologies Corporation
Yuko Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, and image generation method with c...
Patent number
8,168,950
Issue date
May 1, 2012
Hitachi High-Technologies Corporation
Kanji Furuhashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Appearance inspection apparatus with scanning electron microscope a...
Patent number
8,086,021
Issue date
Dec 27, 2011
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam inspection system and an image generation method for...
Patent number
8,086,022
Issue date
Dec 27, 2011
Hitachi High-Technologies Corporation
Hiroshi Miyai
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and inspection method using electron beam
Patent number
7,999,565
Issue date
Aug 16, 2011
Hitachi High-Technologies Corporation
Yasuhiro Gunji
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor device inspection apparatus
Patent number
7,838,828
Issue date
Nov 23, 2010
Hitachi High-Technologies Corporation
Yusuke Ominami
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and inspection method using electron beam
Patent number
7,518,383
Issue date
Apr 14, 2009
Hitachi High-Technologies Corporation
Yasuhiro Gunji
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection method and apparatus using electron beam
Patent number
7,439,504
Issue date
Oct 21, 2008
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
Patent number
7,348,558
Issue date
Mar 25, 2008
Hitachi, Ltd.
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and inspection apparatus using electron beam
Patent number
7,271,385
Issue date
Sep 18, 2007
Hitachi High-Technologies Corporation
Yasuhiro Gunji
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
Patent number
7,030,394
Issue date
Apr 18, 2006
Hitachi, Ltd.
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection method and apparatus using electron beam
Patent number
6,940,069
Issue date
Sep 6, 2005
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and automatic astigmatism adjustmen...
Patent number
6,825,480
Issue date
Nov 30, 2004
Hitachi, Ltd.
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Grant
Map displaying method and apparatus, and navigation system having t...
Patent number
6,714,861
Issue date
Mar 30, 2004
Xanavi Informatics Corporation
Mariko Okude
G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information
Patent Grant
Pattern inspection method and apparatus using electron beam
Patent number
6,614,022
Issue date
Sep 2, 2003
Hitachi, Ltd.
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspecting system using electron beam and inspecting method using same
Patent number
6,486,472
Issue date
Nov 26, 2002
Hitachi, Ltd.
Yasuhiro Gunji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Map displaying method and apparatus, and navigation system having t...
Patent number
6,341,254
Issue date
Jan 22, 2002
Xanavi Informatics Corporations
Mariko Okude
G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information
Patent Grant
Map displaying method and apparatus, and navigation system having t...
Patent number
6,175,802
Issue date
Jan 16, 2001
Xanavi Informatics Corporation
Mariko Okude
G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information
Patent Grant
Navigation system furnished with means for estimating error of moun...
Patent number
6,081,230
Issue date
Jun 27, 2000
Xanavi Informatics Corporation
Masatoshi Hoshino
G01 - MEASURING TESTING
Information
Patent Grant
Vehicle control system, vehicle mounting apparatus, base station ap...
Patent number
5,926,117
Issue date
Jul 20, 1999
Hitachi, Ltd.
Yasuhiro Gunji
G08 - SIGNALLING
Information
Patent Grant
An improved optical branching/coupling unit for an optical fiber gy...
Patent number
5,208,652
Issue date
May 4, 1993
Hitachi, Ltd.
Hisao Sonobe
G01 - MEASURING TESTING
Information
Patent Grant
Optical change-over switch utilizing ferroelectric liquid crystal m...
Patent number
4,836,657
Issue date
Jun 6, 1989
Hitachi, Ltd.
Yasuhiro Gunji
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED-PARTICLE MICROSCOPE DEVICE, AND METHOD OF CONTROLLING CHARG...
Publication number
20120091339
Publication date
Apr 19, 2012
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CIRCUIT PATTERN INSPECTING APPARATUS, MANAGEMENT SYSTEM INCLUDING C...
Publication number
20110255773
Publication date
Oct 20, 2011
Hitachi High-Technologies Corporation
Hiroyuki Takahashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20110163230
Publication date
Jul 7, 2011
Hitachi High-Technologies Corporation
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE INSPECTION APPARATUS
Publication number
20100314542
Publication date
Dec 16, 2010
Hitachi High-Technologies Corporation
Yusuke Ominami
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20100051806
Publication date
Mar 4, 2010
Hitachi High-Technologies Corporation
Yuko Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBS...
Publication number
20090309022
Publication date
Dec 17, 2009
Hitachi High-Technologies Corporation
Yasuhiro GUNJI
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION METHOD AND INSPECTION APPARATUS
Publication number
20090206257
Publication date
Aug 20, 2009
Hitachi High-Technologies Corporation
Yasuhiro GUNJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPERANCE INSPECTION APPARATUS WITH SCANNING ELECTRON MICROSCOPE AN...
Publication number
20090208092
Publication date
Aug 20, 2009
Hitachi High-Technologies Corporation
Yusuke Ominami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS, AND IMAGE GENERATION METHOD WITH C...
Publication number
20090134340
Publication date
May 28, 2009
Hitachi High-Technologies Corporation
Kanji FURUHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTRON BEAM
Publication number
20090123059
Publication date
May 14, 2009
Hitachi High-Technologies Corporation
Yasuhiro GUNJI
G01 - MEASURING TESTING
Information
Patent Application
Electron Beam Inspection System and an Image Generation Method for...
Publication number
20090026369
Publication date
Jan 29, 2009
Hitachi High-Technologies Corporation
Hiroshi MIYAI
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR DEVICE INSPECTION APPARATUS
Publication number
20080308725
Publication date
Dec 18, 2008
Hitachi High-Technologies Corporation
Yusuke Ominami
G01 - MEASURING TESTING
Information
Patent Application
Charged particle beam apparatus and automatic astigmatism adjustmen...
Publication number
20060289751
Publication date
Dec 28, 2006
Hitachi, Ltd
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTRON BEAM
Publication number
20060251318
Publication date
Nov 9, 2006
Hitachi High-Technologies Corporation
Yasuhiro GUNJI
G01 - MEASURING TESTING
Information
Patent Application
Charged particle beam apparatus
Publication number
20060151698
Publication date
Jul 13, 2006
Hitachi High-Technologies Corporation
Yuko Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Inspection method and inspection apparatus using electron beam
Publication number
20060076490
Publication date
Apr 13, 2006
Yasuhiro Gunji
G01 - MEASURING TESTING
Information
Patent Application
Charged-particle beam apparatus and method for automatically correc...
Publication number
20060060781
Publication date
Mar 23, 2006
Masahiro Watanabe
B82 - NANO-TECHNOLOGY
Information
Patent Application
Pattern inspection method and apparatus using electron beam
Publication number
20050263703
Publication date
Dec 1, 2005
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle beam apparatus and automatic astigmatism adjustmen...
Publication number
20050092930
Publication date
May 5, 2005
Hitachi, Ltd. Incorporation
Masahiro Watanabe
G01 - MEASURING TESTING
Information
Patent Application
Inspection method and inspection apparatus using electron beam
Publication number
20050040331
Publication date
Feb 24, 2005
Yasuhiro Gunji
G01 - MEASURING TESTING
Information
Patent Application
Inspection method and inspection apparatus using electron beam
Publication number
20040026633
Publication date
Feb 12, 2004
Yasuhiro Gunji
G01 - MEASURING TESTING
Information
Patent Application
Pattern inspection method and apparatus using electron beam
Publication number
20040028272
Publication date
Feb 12, 2004
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Information display system for displaying specified location with m...
Publication number
20040012506
Publication date
Jan 22, 2004
Toshio Fujiwara
G08 - SIGNALLING
Information
Patent Application
Information display system for displaying specified location with m...
Publication number
20030201914
Publication date
Oct 30, 2003
Toshio Fujiwara
G08 - SIGNALLING
Information
Patent Application
Charged-particle beam apparatus and method for automatically correc...
Publication number
20030006371
Publication date
Jan 9, 2003
Masahiro Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTING SYSTEM USING ELECTRON BEAM AND INSPECTING METHOD USING SAME
Publication number
20020117619
Publication date
Aug 29, 2002
Yasuhiro Gunji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Map displaying method and apparatus, and navigation system having t...
Publication number
20020038181
Publication date
Mar 28, 2002
XANAVI INFORMATICS CORPORATION
Mariko Okude
G01 - MEASURING TESTING
Information
Patent Application
Pattern inspection method and apparatus using electron beam
Publication number
20020030166
Publication date
Mar 14, 2002
Takashi Hiroi
H01 - BASIC ELECTRIC ELEMENTS