Yasuhiro HAMADA

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer processing method
- Patent number 12,211,692
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Noriaki Okabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 10,460,950
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Akinobu Kakimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20250174462
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Takuya SEINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20250154645
- Publication date May 15, 2025
- Tokyo Electron Limited
- Tadashi MITSUNARI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220415661
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20220415660
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING METHOD
- Publication number 20210280419
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Noriaki OKABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200035496
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20200035497
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20170125255
- Publication date May 4, 2017
- TOKYO ELECTRON LIMITED
- Akinobu KAKIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING, SUBSTRATE MOUNTING TABLE AND PLASMA PROCESSING APPARATU...
- Publication number 20100012274
- Publication date Jan 21, 2010
- TOKYO ELECTRON LIMITED
- Masaaki Miyagawa
- H01 - BASIC ELECTRIC ELEMENTS

Yasuhiro HAMADA

Person

Patents Grantslast 30 patents

Wafer processing method

Substrate processing system and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

FILM FORMING METHOD AND FILM FORMING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PROCESSING APPARATUS

WAFER PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

FOCUS RING, SUBSTRATE MOUNTING TABLE AND PLASMA PROCESSING APPARATU...