Yasuhiro HIDAKA

Person

Kumagaya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Surface position detection apparatus, exposure apparatus, and expos...
- Patent number 9,927,713
- Issue date Mar 27, 2018
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface positioning detecting apparatus, exposure apparatus and dev...
- Patent number 9,594,316
- Issue date Mar 14, 2017
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus, exposure apparatus, and expos...
- Patent number 9,519,223
- Issue date Dec 13, 2016
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus, exposure apparatus, and expos...
- Patent number 9,069,261
- Issue date Jun 30, 2015
- Nikon Corporation
- Yasuhiro Hidaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Surface position detecting apparatus, exposure apparatus, and devic...
- Patent number 8,599,387
- Issue date Dec 3, 2013
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting apparatus, exposure apparatus, surface p...
- Patent number 8,502,978
- Issue date Aug 6, 2013
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting apparatus, exposure apparatus and device...
- Patent number 8,432,554
- Issue date Apr 30, 2013
- Nikon Corporation
- Yasuhiro Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Surface position detecting apparatus, exposure apparatus, surface p...
- Patent number 8,411,249
- Issue date Apr 2, 2013
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,384,875
- Issue date Feb 26, 2013
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detecting apparatus, exposure apparatus, surface p...
- Patent number 8,223,345
- Issue date Jul 17, 2012
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface position detection apparatus, exposure apparatus, and expos...
- Patent number 8,149,382
- Issue date Apr 3, 2012
- Nikon Corporation
- Yasuhiro Hidaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Surface position detecting apparatus, surface position detecting me...
- Patent number 8,111,406
- Issue date Feb 7, 2012
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for measuring displacement of a stage
- Patent number 7,283,200
- Issue date Oct 16, 2007
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometer, exposure apparatus, exposure method and interferenc...
- Patent number 7,081,960
- Issue date Jul 25, 2006
- Nikon Corporation
- Yasuhiro Hidaka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
LASER RADAR
- Publication number 20220082697
- Publication date Mar 17, 2022
- Nikon Corporation
- Anthony SLOTWINSKI
- G01 - MEASURING TESTING
Information Patent Application
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...
- Publication number 20180188657
- Publication date Jul 5, 2018
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...
- Publication number 20170075227
- Publication date Mar 16, 2017
- Nikon Corporation
- Yasuhiro HIDAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...
- Publication number 20150248064
- Publication date Sep 3, 2015
- Nikon Corporation
- Yasuhiro HIDAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITIONING DETECTING APPARATUS, EXPOSURE APPARATUS AND DEV...
- Publication number 20130242304
- Publication date Sep 19, 2013
- Nikon Corporation
- Yasuhiro HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...
- Publication number 20120162623
- Publication date Jun 28, 2012
- NIKON CORPORATION
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REFLECTOR, OPTICAL ELEMENT, INTERFEROMETER SYSTEM, STAGE DEVICE, EX...
- Publication number 20120127478
- Publication date May 24, 2012
- Nikon Corporation
- Yuichi Shibazaki
- G02 - OPTICS
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20100079743
- Publication date Apr 1, 2010
- Nikon Corporation
- Yasuhiro Hidaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE P...
- Publication number 20100062351
- Publication date Mar 11, 2010
- Nikon Corporation
- Yasuhiro HIDAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE P...
- Publication number 20090323036
- Publication date Dec 31, 2009
- Nikon Corporation
- Yasuhiro HIDAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE P...
- Publication number 20090305175
- Publication date Dec 10, 2009
- Nikon Corporation
- Yasuhiro HIDAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus, Exposure Method and Device Manufacturing Method...
- Publication number 20070247640
- Publication date Oct 25, 2007
- Nikon Corporation
- Nobutaka Magome
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Stage apparatus and exposure apparatus
- Publication number 20070188732
- Publication date Aug 16, 2007
- NIKON CORPOATION
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reflector, optical element, interferometer system, stage device, ex...
- Publication number 20070008548
- Publication date Jan 11, 2007
- Nikon Corporation
- Yuichi Shibazaki
- G02 - OPTICS
Information Patent Application
System and method for measuring displacement of a stage
- Publication number 20050012918
- Publication date Jan 20, 2005
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Interferometer, exposure apparatus, exposure method and interferenc...
- Publication number 20030223076
- Publication date Dec 4, 2003
- Nikon Corporation
- Yasuhiro Hidaka
- G01 - MEASURING TESTING

Yasuhiro HIDAKA

Person

Patents Grantslast 30 patents

Surface position detection apparatus, exposure apparatus, and expos...

Surface positioning detecting apparatus, exposure apparatus and dev...

Surface position detection apparatus, exposure apparatus, and expos...

Surface position detection apparatus, exposure apparatus, and expos...

Surface position detecting apparatus, exposure apparatus, and devic...

Surface position detecting apparatus, exposure apparatus, surface p...

Surface position detecting apparatus, exposure apparatus and device...

Surface position detecting apparatus, exposure apparatus, surface p...

Exposure apparatus, exposure method, and method for producing device

Surface position detecting apparatus, exposure apparatus, surface p...

Surface position detection apparatus, exposure apparatus, and expos...

Surface position detecting apparatus, surface position detecting me...

System and method for measuring displacement of a stage

Interferometer, exposure apparatus, exposure method and interferenc...

Patents Applicationslast 30 patents

LASER RADAR

SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...

SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...

SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...

SURFACE POSITIONING DETECTING APPARATUS, EXPOSURE APPARATUS AND DEV...

SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOS...

REFLECTOR, OPTICAL ELEMENT, INTERFEROMETER SYSTEM, STAGE DEVICE, EX...

Exposure apparatus, exposure method, and method for producing device

SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE P...

SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE P...

SURFACE POSITION DETECTING APPARATUS, EXPOSURE APPARATUS, SURFACE P...

Exposure Apparatus, Exposure Method and Device Manufacturing Method...

Stage apparatus and exposure apparatus

Reflector, optical element, interferometer system, stage device, ex...

System and method for measuring displacement of a stage

Interferometer, exposure apparatus, exposure method and interferenc...