YASUHIRO HIDAKA

Person

KANAGAWA, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pupil ellipsometry measurement apparatus and method and method of f...
- Patent number 12,228,499
- Issue date Feb 18, 2025
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING
Information Patent Grant
Spectrometer, metrology system, and semiconductor inspection method
- Patent number 12,188,818
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Hidaka Yasuhiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ellipsometer and inspection device for inspecting semiconductor dev...
- Patent number 11,885,608
- Issue date Jan 30, 2024
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Optical device
- Patent number 11,761,906
- Issue date Sep 19, 2023
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Pupil ellipsometry measurement apparatus and method and method of f...
- Patent number 11,604,136
- Issue date Mar 14, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G02 - OPTICS
Information Patent Grant
Ellipsometer
- Patent number 11,493,322
- Issue date Nov 8, 2022
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Lighting device and inspection apparatus having the same
- Patent number 11,314,073
- Issue date Apr 26, 2022
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G02 - OPTICS
Information Patent Grant
Ellipsometer and inspection device for semiconductor device
- Patent number 11,193,882
- Issue date Dec 7, 2021
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting apparatus based on hyperspectral imaging
- Patent number 11,037,283
- Issue date Jun 15, 2021
- Samsung Electronics Co., Ltd.
- Sung-Ho Jang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Spectrometer optical system, semiconductor inspection apparatus inc...
- Patent number 10,724,899
- Issue date Jul 28, 2020
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASURING APPARATUS AND TESTING APPARATUS HAVING THE SAME
- Publication number 20240183777
- Publication date Jun 6, 2024
- Samsung Electronics Co., Ltd.
- Yasuhiro HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR INSPECTING SURFACE OF OBJECT
- Publication number 20240183796
- Publication date Jun 6, 2024
- Samsung Electronics Co., Ltd.
- YASUHIRO HIDAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...
- Publication number 20230204493
- Publication date Jun 29, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING
Information Patent Application
ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCL...
- Publication number 20230152213
- Publication date May 18, 2023
- Samsung Electronics Co., LTD
- Yasuhiro HIDAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECTROMETER, METROLOGY SYSTEM, AND SEMICONDUCTOR INSPECTION METHOD
- Publication number 20220404197
- Publication date Dec 22, 2022
- Samsung Electronics Co., Ltd.
- Hidaka YASUHIRO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL DEVICE
- Publication number 20220214288
- Publication date Jul 7, 2022
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G01 - MEASURING TESTING
Information Patent Application
PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...
- Publication number 20220074848
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING
Information Patent Application
ELLIPSOMETER
- Publication number 20220003535
- Publication date Jan 6, 2022
- Samsung Electronics Co., Ltd.
- Yasuhiro HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
ELLIPSOMETER AND INSPECTION DEVICE FOR INSPECTING SEMICONDUCTOR DEV...
- Publication number 20220003538
- Publication date Jan 6, 2022
- Samsung Electronics Co., Ltd.
- Yasuhiro HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
ELLIPSOMETER AND INSPECTION DEVICE FOR SEMICONDUCTOR DEVICE
- Publication number 20210156790
- Publication date May 27, 2021
- Samsung Electronics Co., Ltd.
- Yasuhiro HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTING APPARATUS BASED ON HYPERSPECTRAL IMAGING
- Publication number 20200184624
- Publication date Jun 11, 2020
- Samsung Electronics Co., Ltd.
- Sung-ho JANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SPECTROMETER OPTICAL SYSTEM, SEMICONDUCTOR INSPECTION APPARATUS INC...
- Publication number 20200149961
- Publication date May 14, 2020
- Samsung Electronics Co., Ltd.
- Yasuhiro Hidaka
- G01 - MEASURING TESTING
Information Patent Application
LIGHTING DEVICE AND INSPECTION APPARATUS HAVING THE SAME
- Publication number 20200132977
- Publication date Apr 30, 2020
- Samsung Electronics Co., Ltd.
- YASUHIRO HIDAKA
- G02 - OPTICS

YASUHIRO HIDAKA

Person

Patents Grantslast 30 patents

Pupil ellipsometry measurement apparatus and method and method of f...

Spectrometer, metrology system, and semiconductor inspection method

Ellipsometer and inspection device for inspecting semiconductor dev...

Optical device

Pupil ellipsometry measurement apparatus and method and method of f...

Ellipsometer

Lighting device and inspection apparatus having the same

Ellipsometer and inspection device for semiconductor device

Inspecting apparatus based on hyperspectral imaging

Spectrometer optical system, semiconductor inspection apparatus inc...

Patents Applicationslast 30 patents

MEASURING APPARATUS AND TESTING APPARATUS HAVING THE SAME

APPARATUS FOR INSPECTING SURFACE OF OBJECT

PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...

ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCL...

SPECTROMETER, METROLOGY SYSTEM, AND SEMICONDUCTOR INSPECTION METHOD

OPTICAL DEVICE

PUPIL ELLIPSOMETRY MEASUREMENT APPARATUS AND METHOD AND METHOD OF F...

ELLIPSOMETER

ELLIPSOMETER AND INSPECTION DEVICE FOR INSPECTING SEMICONDUCTOR DEV...

ELLIPSOMETER AND INSPECTION DEVICE FOR SEMICONDUCTOR DEVICE

INSPECTING APPARATUS BASED ON HYPERSPECTRAL IMAGING

SPECTROMETER OPTICAL SYSTEM, SEMICONDUCTOR INSPECTION APPARATUS INC...

LIGHTING DEVICE AND INSPECTION APPARATUS HAVING THE SAME