Yasuhiro Kaga

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Yokohama-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Defect inspecting apparatus for semiconductor wafer
- Patent number 7,512,501
- Issue date Mar 31, 2009
- Kabushiki Kaisha Toshiba
- Hiroyuki Morinaga
- G01 - MEASURING TESTING
Information Patent Grant
Substrate cross-section observing apparatus
- Patent number 5,576,542
- Issue date Nov 19, 1996
- Kabushiki Kaisha Toshiba
- Yasuhiro Kaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic focusing method for scanning electron microscopy
- Patent number 5,302,829
- Issue date Apr 12, 1994
- Kabushiki Kaisha Toshiba
- Fumio Komatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for measuring pattern profile
- Patent number 5,161,201
- Issue date Nov 3, 1992
- Kabushiki Kaisha Toshiba
- Yasuhiro Kaga
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring pattern dimension
- Patent number 5,159,643
- Issue date Oct 27, 1992
- Kabushiki Kaisha Toshiba
- Yasuhiro Kaga
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Defect inspecting apparatus, defect inspecting method, semiconducto...
- Publication number 20080052021
- Publication date Feb 28, 2008
- Hiroyuki Morinaga
- G01 - MEASURING TESTING