Yasuhiro Kuga

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 11,798,821
- Issue date Oct 24, 2023
- Tokyo Electron Limited
- Yukinobu Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus and heat treatment method
- Patent number 11,393,702
- Issue date Jul 19, 2022
- Tokyo Electron Limited
- Shinsuke Takaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cooling apparatus, substrate cooling method, and storage...
- Patent number 8,776,393
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Kouichi Mizunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat processing apparatus of substrate
- Patent number 6,551,448
- Issue date Apr 22, 2003
- Tokyo Electron Limited
- Yasuhiro Kuga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20240030049
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Yukinobu OTSUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20230152038
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Yasuhiro Kuga
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20230152704
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Yasuhiro Kuga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20210118707
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Yukinobu OTSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20210005468
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY APPARATUS
- Publication number 20140041805
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Yasuhiro KUGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate cooling apparatus, substrate cooling method, and storage...
- Publication number 20110085299
- Publication date Apr 14, 2011
- TOKYO ELECTRON LIMITED
- Kouichi Mizunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat processing apparatus of substrate
- Publication number 20010053507
- Publication date Dec 20, 2001
- TOKYO ELECTRON LIMITED
- Yasuhiro Kuga
- H01 - BASIC ELECTRIC ELEMENTS

Yasuhiro Kuga

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing method, and st...

Heat treatment apparatus and heat treatment method

Substrate cooling apparatus, substrate cooling method, and storage...

Heat processing apparatus of substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

HEAT TREATMENT APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY APPARATUS

Substrate cooling apparatus, substrate cooling method, and storage...

Heat processing apparatus of substrate