Yasuhiro Kurata

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 7,018,555
- Issue date Mar 28, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kaoru Shimbara
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate treating apparatus
- Patent number 5,485,644
- Issue date Jan 23, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Kaoru Shinbara
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Substrate treatment method and substrate treatment apparatus
- Publication number 20050193943
- Publication date Sep 8, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Kaoru Shimbara
- G11 - INFORMATION STORAGE
Information Patent Application
Substrate treatment method and substrate treatment apparatus
- Publication number 20040159343
- Publication date Aug 19, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Kaoru Shimbara
- G11 - INFORMATION STORAGE