Yasuhiro Megawa

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,840,094
- Issue date Nov 17, 2020
- Kokusai Electric Corporation
- Kiyohiko Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate and...
- Patent number 8,901,013
- Issue date Dec 2, 2014
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for processing a substrate, method of processing a substrate...
- Patent number 8,448,599
- Issue date May 28, 2013
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Device for processing a substrate, method of processing a substrate...
- Patent number 8,003,411
- Issue date Aug 23, 2011
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Manufacturing method of a semiconductor device, and substrate proce...
- Patent number 7,713,883
- Issue date May 11, 2010
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for processing substrate and method of manufacturing semicon...
- Patent number 7,682,987
- Issue date Mar 23, 2010
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240105465
- Publication date Mar 28, 2024
- Kokusai Electric Corporation
- Takahiro MIYAKURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20230349065
- Publication date Nov 2, 2023
- Kokusai Electric Corporation
- Takahiro MIYAKURA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230295837
- Publication date Sep 21, 2023
- Kokusai Electric Corporation
- Kaichiro MINAMI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220178019
- Publication date Jun 9, 2022
- Kokusai Electric Corporation
- Yugo ORIHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190206679
- Publication date Jul 4, 2019
- Kokusai Electric Corporation
- Kiyohiko MAEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE AND...
- Publication number 20130157474
- Publication date Jun 20, 2013
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for processing a substrate, method of processing a substrate...
- Publication number 20110271907
- Publication date Nov 10, 2011
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20110065286
- Publication date Mar 17, 2011
- Hitachi Kokusai Electric Inc.
- Takafumi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of a semiconductor device, and substrate proce...
- Publication number 20100192855
- Publication date Aug 5, 2010
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for processing substrate and method of manufacturing semicon...
- Publication number 20100136714
- Publication date Jun 3, 2010
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for Processing Substrate and Method of Manufacturing Semicon...
- Publication number 20090170337
- Publication date Jul 2, 2009
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20090064765
- Publication date Mar 12, 2009
- Hitachi Kokusai Electric Inc.
- Yasuhiro Megawa
- G01 - MEASURING TESTING
Information Patent Application
Manufacturing Method of a Semiconductor Device, and Substrate Proce...
- Publication number 20080124943
- Publication date May 29, 2008
- Hitachi Kokusai Electric Inc.
- Kazuhiro Yuasa
- H01 - BASIC ELECTRIC ELEMENTS

Yasuhiro Megawa

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus, method of processing substrate and...

Device for processing a substrate, method of processing a substrate...

Device for processing a substrate, method of processing a substrate...

Manufacturing method of a semiconductor device, and substrate proce...

Device for processing substrate and method of manufacturing semicon...

Patents Applicationslast 30 patents

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE AND...

Device for processing a substrate, method of processing a substrate...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

Manufacturing method of a semiconductor device, and substrate proce...

Device for processing substrate and method of manufacturing semicon...

Device for Processing Substrate and Method of Manufacturing Semicon...

Method of Manufacturing Semiconductor Device

Manufacturing Method of a Semiconductor Device, and Substrate Proce...