Yasuhiro Mizohata

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pressure sensor and substrate processing apparatus
- Patent number 7,409,864
- Issue date Aug 12, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Takeshi Yane
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,396,199
- Issue date Jul 8, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Yoshihiro Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Differential pressure flowmeter, flow controller, and apparatus for...
- Patent number 7,337,677
- Issue date Mar 4, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- G01 - MEASURING TESTING
Information Patent Grant
Plating apparatus, cartridge and copper dissolution tank for use in...
- Patent number 7,279,079
- Issue date Oct 9, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plating apparatus and plating method
- Patent number 7,204,916
- Issue date Apr 17, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Plating apparatus, plating cup and cathode ring
- Patent number 7,169,269
- Issue date Jan 30, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plating apparatus and plating method
- Patent number 6,958,113
- Issue date Oct 25, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cooling method and apparatus
- Patent number 5,638,687
- Issue date Jun 17, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Substrate cooling device and substrate heat-treating apparatus
- Patent number 5,411,076
- Issue date May 2, 1995
- Dainippon Screen Mfg. Co., Ltd. Corp. of Japan
- Minobu Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PRESSURE SENSOR AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20080236291
- Publication date Oct 2, 2008
- Takeshi Yane
- G01 - MEASURING TESTING
Information Patent Application
PLATING APPARATUS, CARTRIDGE AND COPPER DISSOLUTION TANK FOR USE IN...
- Publication number 20070235341
- Publication date Oct 11, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS, PLATING CUP AND CATHODE RING
- Publication number 20070080057
- Publication date Apr 12, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PLATING APPARATUS, PLATING CUP AND CATHODE RING
- Publication number 20070023277
- Publication date Feb 1, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Pressure sensor and substrate processing apparatus
- Publication number 20060260409
- Publication date Nov 23, 2006
- DAINIPPON SCREEN MFG. CO. LTD.
- Takeshi Yane
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for supplying liquid and apparatus for process...
- Publication number 20060248934
- Publication date Nov 9, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for supplying liquid and apparatus for process...
- Publication number 20060137419
- Publication date Jun 29, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- G01 - MEASURING TESTING
Information Patent Application
Differential pressure flowmeter, flow controller, and apparatus for...
- Publication number 20060112771
- Publication date Jun 1, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- G05 - CONTROLLING REGULATING
Information Patent Application
Plating apparatus, plating cup and cathode ring
- Publication number 20040140199
- Publication date Jul 22, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Plating apparatus and plating method
- Publication number 20040118676
- Publication date Jun 24, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Plating apparatus and plating method
- Publication number 20040084315
- Publication date May 6, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Plating apparatus, cartridge and copper dissolution tank for use in...
- Publication number 20040069647
- Publication date Apr 15, 2004
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Plating apparatus and plating method
- Publication number 20040055890
- Publication date Mar 25, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030123971
- Publication date Jul 3, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Yoshihiro Koyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Yasuhiro Mizohata

Person

Patents Grantslast 30 patents

Pressure sensor and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Differential pressure flowmeter, flow controller, and apparatus for...

Plating apparatus, cartridge and copper dissolution tank for use in...

Plating apparatus and plating method

Plating apparatus, plating cup and cathode ring

Plating apparatus and plating method

Substrate cooling method and apparatus

Substrate cooling device and substrate heat-treating apparatus

Patents Applicationslast 30 patents

PRESSURE SENSOR AND SUBSTRATE PROCESSING APPARATUS

PLATING APPARATUS, CARTRIDGE AND COPPER DISSOLUTION TANK FOR USE IN...

PLATING APPARATUS, PLATING CUP AND CATHODE RING

PLATING APPARATUS, PLATING CUP AND CATHODE RING

Pressure sensor and substrate processing apparatus

Apparatus and method for supplying liquid and apparatus for process...

Apparatus and method for supplying liquid and apparatus for process...

Differential pressure flowmeter, flow controller, and apparatus for...

Plating apparatus, plating cup and cathode ring

Plating apparatus and plating method

Plating apparatus and plating method

Plating apparatus, cartridge and copper dissolution tank for use in...

Plating apparatus and plating method

Substrate processing apparatus and substrate processing method