TREA

Yasuhiro MORIKAWA

Follow

Person

  • Susono-shi, JP
People

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD
    • Publication number 20240304453
    • Publication date Sep 12, 2024
    • Ulvac, Inc.
    • Taichi SUZUKI
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20230420220
    • Publication date Dec 28, 2023
    • Ulvac, Inc.
    • Taichi SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING DEVICE
    • Publication number 20220392746
    • Publication date Dec 8, 2022
    • ULVAC, Inc.
    • Taichi Suzuki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20220344167
    • Publication date Oct 27, 2022
    • Ulvac, Inc.
    • Taichi SUZUKI
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    SILICON DRY ETCHING METHOD
    • Publication number 20220044938
    • Publication date Feb 10, 2022
    • Ulvac, Inc.
    • Kenta DOI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF PROCESSING WIRING SUBSTRATE
    • Publication number 20200315021
    • Publication date Oct 1, 2020
    • ULVAC, Inc.
    • Muneyuki SATO
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PLASMA PROCESSING DEVICE
    • Publication number 20170316917
    • Publication date Nov 2, 2017
    • ULVAC, Inc.
    • Takahide MURAYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING APPARATUS
    • Publication number 20150200078
    • Publication date Jul 16, 2015
    • Ulvac, Inc.
    • Yasuhiro Morikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ETCHING APPARATUS
    • Publication number 20120186746
    • Publication date Jul 26, 2012
    • Ulvac, Inc.
    • Yasuhiro Morikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20120171869
    • Publication date Jul 5, 2012
    • Yasuhiro Morikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma Processing Method and Plasma Processing Apparatus
    • Publication number 20110180388
    • Publication date Jul 28, 2011
    • Ulvac, Inc.
    • Yasuhiro Morikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20110117742
    • Publication date May 19, 2011
    • ULVAC, Inc.
    • Yasuhiro Morikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, DRY-ETC...
    • Publication number 20100270654
    • Publication date Oct 28, 2010
    • Toshio HAYASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR DRY ETCHING INTERLAYER INSULATING FILM
    • Publication number 20100219158
    • Publication date Sep 2, 2010
    • Yasuhiro Morikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND SYSTEM
    • Publication number 20100203737
    • Publication date Aug 12, 2010
    • ULVAC, Inc.
    • Yasuhiro MORIKAWA
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    DRY ETCHING APPARATUS AND DRY ETCHING METHOD
    • Publication number 20100133235
    • Publication date Jun 3, 2010
    • Yasuhiro Morikawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DRY ETCHING METHOD
    • Publication number 20100133233
    • Publication date Jun 3, 2010
    • Yasuhiro Morikawa
    • H03 - BASIC ELECTRONIC CIRCUITRY
  • Information Patent Application

    DRY ETCHING METHOD
    • Publication number 20100062606
    • Publication date Mar 11, 2010
    • Ulvac, Inc.
    • Yasuhiro Morikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING METHOD
    • Publication number 20090277873
    • Publication date Nov 12, 2009
    • ULVC, Inc
    • Yasuhiro Morikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS AND METHOD FOR DRY ETCHING
    • Publication number 20090261066
    • Publication date Oct 22, 2009
    • ULVAC, Inc.
    • Yasuhiro Morikawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Semiconductor device and method for manufacturing the same, dry-etc...
    • Publication number 20090102025
    • Publication date Apr 23, 2009
    • Toshio Hayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Ethcing method and system
    • Publication number 20070166844
    • Publication date Jul 19, 2007
    • Yasuhiro Morikawa
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    Method for etching organic film, method for fabricating semiconduct...
    • Publication number 20020197747
    • Publication date Dec 26, 2002
    • Matsushita Electric Industrial Co. Ltd.
    • Hideo Nakagawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method for etching organic film, method for fabricating semiconduct...
    • Publication number 20010049150
    • Publication date Dec 6, 2001
    • Hideo Nakagawa
    • H01 - BASIC ELECTRIC ELEMENTS