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Yasuhiro NISHIMORI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus and method
    • Patent number 11,152,192
    • Issue date Oct 19, 2021
    • HITACHI HIGH-TECH CORPORATION
    • Naoki Yasui
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing method
    • Patent number 8,486,291
    • Issue date Jul 16, 2013
    • Hitachi High-Technologies Corporation
    • Takeshi Ohmori
    • B08 - CLEANING
  • Information Patent Grant

    Plasma processing method
    • Patent number 8,277,563
    • Issue date Oct 2, 2012
    • Hitachi High-Technologies Corporation
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method for etching a sample
    • Patent number 8,114,244
    • Issue date Feb 14, 2012
    • Hitachi High-Technologies Corporation
    • Kousa Hirota
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 8,075,733
    • Issue date Dec 13, 2011
    • Hitachi High-Technologies Corporation
    • Seiichi Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing method
    • Patent number 7,909,933
    • Issue date Mar 22, 2011
    • Hitachi High-Technologies Corporation
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus and vacuum processing method
    • Patent number 7,112,805
    • Issue date Sep 26, 2006
    • Hitachi High-Technologies Corporation
    • Yoshitaka Kai
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND METHOD
    • Publication number 20190115193
    • Publication date Apr 18, 2019
    • Hitachi High-Technologies Corporation
    • Naoki YASUI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND METHOD
    • Publication number 20140011365
    • Publication date Jan 9, 2014
    • Hitachi High-Technologies Corporation
    • Naoki YASUI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20120125890
    • Publication date May 24, 2012
    • Hitachi High-Technologies Corporation
    • Takeshi OHMORI
    • B08 - CLEANING
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20110120495
    • Publication date May 26, 2011
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR SEASONING PLASMA PROCESSING APPARATUS, AND METHOD FOR DE...
    • Publication number 20100178415
    • Publication date Jul 15, 2010
    • Hitachi High-Technologies Corporation
    • Yasuhiro NISHIMORI
    • B08 - CLEANING
  • Information Patent Application

    METHOD FOR ETCHING A SAMPLE
    • Publication number 20100159704
    • Publication date Jun 24, 2010
    • Hitachi High-Technologies Corporation
    • Kousa HIROTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20100043976
    • Publication date Feb 25, 2010
    • Hitachi High-Technologies Corporation
    • Seiichi WATANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20090214401
    • Publication date Aug 27, 2009
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma Processing Method
    • Publication number 20080216865
    • Publication date Sep 11, 2008
    • Masunori Ishihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dry etching method
    • Publication number 20070090090
    • Publication date Apr 26, 2007
    • Koichi Nakaune
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum processing apparatus and vacuum processing method
    • Publication number 20070023683
    • Publication date Feb 1, 2007
    • Yoshitaka Kai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Dry etching method
    • Publication number 20060016781
    • Publication date Jan 26, 2006
    • Kenichi Kuwabara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum processing apparatus and vacuum processing method
    • Publication number 20050218337
    • Publication date Oct 6, 2005
    • Yoshitaka Kai
    • H01 - BASIC ELECTRIC ELEMENTS