Yasuhiro Oshima

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Film forming method for dielectric film
- Patent number 7,867,922
- Issue date Jan 11, 2011
- Tokyo Electron Limited
- Shinji Ide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LIGHT SOURCE DEVICE, SUBSTRATE TREATING DEVICE, AND SUBSTRATE TREAT...
- Publication number 20090173715
- Publication date Jul 9, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiro Oshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film Forming Method for Dielectric Film
- Publication number 20090152686
- Publication date Jun 18, 2009
- Tokyo Electron Limited
- Shinji Ide
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD OF POROUS FILM AND COMPUTER-READABLE RECORDING...
- Publication number 20090053895
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Yasuhiro OSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...