Yasuhiro OSUGA

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Patents Grantslast 30 patents

Information Patent Grant
Inspection device and method for operating inspection device
- Patent number 11,614,477
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Yasuhiro Osuga
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION DEVICE AND METHOD FOR OPERATING INSPECTION DEVICE
- Publication number 20210132135
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Yasuhiro OSUGA
- G01 - MEASURING TESTING
Information Patent Application
PROBE APPARATUS AND WAFER TRANSFER SYSTEM
- Publication number 20150362546
- Publication date Dec 17, 2015
- TOKYO ELECTRON LIMITED
- Yasuhiro OSUGA
- G01 - MEASURING TESTING