Yasuhiro Sakamoto

Person

Tosu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,565,928
- Issue date May 20, 2003
- Tokyo Electron Limited
- Yasuhiro Sakamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Treatment apparatus and treatment method
- Patent number 6,368,776
- Issue date Apr 9, 2002
- Tokyo Electron Limited
- Koji Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number RE37470
- Issue date Dec 18, 2001
- Tokyo Electron Limited
- Jun Ohkura
- 396 - Photography
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,284,044
- Issue date Sep 4, 2001
- Tokyo Electron Limited
- Yasuhiro Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus
- Patent number 5,672,205
- Issue date Sep 30, 1997
- Tokyo Electron Limited
- Akihiro Fujimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 5,664,254
- Issue date Sep 2, 1997
- Tokyo Electron Limited
- Jun Ohkura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist processing apparatus, substrate processing apparatus and met...
- Patent number 5,626,675
- Issue date May 6, 1997
- Tokyo Electron Limited
- Yasuhiro Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for heat-treating substrate
- Patent number 5,620,560
- Issue date Apr 15, 1997
- Tokyo Electron Limited
- Masami Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer conveyor apparatus and method for detecting inclination of wa...
- Patent number 5,239,182
- Issue date Aug 24, 1993
- Tokyo Electron Saga Kabushiki Kaisha
- Kiyohisa Tateyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid coating device
- Patent number 5,127,362
- Issue date Jul 7, 1992
- Tokyo Electron Limited
- Haruo Iwatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resist process apparatus
- Patent number 5,061,144
- Issue date Oct 29, 1991
- Tokyo Electron Limited
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,028,955
- Issue date Jul 2, 1991
- Tokyo Electron Limited
- Yasushi Hayashida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Film forming method and film forming apparatus
- Publication number 20010041229
- Publication date Nov 15, 2001
- Yasuhiro Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS

Yasuhiro Sakamoto

Person

Patents Grantslast 30 patents

Film forming method and film forming apparatus

Treatment apparatus and treatment method

Substrate processing apparatus and substrate processing method

Film forming method and film forming apparatus

Coating apparatus

Substrate processing apparatus and substrate processing method

Resist processing apparatus, substrate processing apparatus and met...

Method and apparatus for heat-treating substrate

Wafer conveyor apparatus and method for detecting inclination of wa...

Liquid coating device

Resist process apparatus

Exposure apparatus

Patents Applicationslast 30 patents

Film forming method and film forming apparatus