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Yasuhiro Satou
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Hyogo, JP
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last 30 patents
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Patent Grant
Process control device and process control method permitting proces...
Patent number
6,480,755
Issue date
Nov 12, 2002
Mitsubishi Denki Kabushiki Kaisha
Masaki Ootani
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Process control device and process control method enabling restorat...
Patent number
6,463,348
Issue date
Oct 8, 2002
Mitsubishi Denki Kabushiki Kaisha
Ryuji Takechi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor manufacturing system for simultaneous processing of p...
Patent number
6,397,119
Issue date
May 28, 2002
Mitsubishi Denki Kabushiki Kaisha
Yasuhiro Marume
G05 - CONTROLLING REGULATING