Yasuhiro SHIBA

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus and substrate treating system includin...
- Patent number 11,387,121
- Issue date Jul 12, 2022
- SCREEN Holdings Co., Ltd.
- Tatsuhisa Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing unit, method for detecting the position of a s...
- Patent number 7,139,638
- Issue date Nov 21, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING APPARATUS AND EXHAUST METHOD THEREOF
- Publication number 20190293353
- Publication date Sep 26, 2019
- SCREEN Holdings Co., Ltd.
- Yasuhiro SHIBA
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM
- Publication number 20190273005
- Publication date Sep 5, 2019
- SCREEN Holdings Co., Ltd.
- Tatsuhisa TSUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR...
- Publication number 20100330273
- Publication date Dec 30, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro SHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR...
- Publication number 20080008837
- Publication date Jan 10, 2008
- Yasuhiro SHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing unit, method for detecting the position of a s...
- Publication number 20050065634
- Publication date Mar 24, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Toshihiro Nakajima
- H01 - BASIC ELECTRIC ELEMENTS