Yasuhiro SUGIMOTO

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Doping method, doping apparatus and method of manufacturing semicon...
- Patent number 9,472,404
- Issue date Oct 18, 2016
- Tokyo Electron Limited
- Hirokazu Ueda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DOPING METHOD, DOPING APPARATUS, AND SEMICONDUCTOR ELEMENT MANUFACT...
- Publication number 20180012763
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT MANUFACTURING METHOD
- Publication number 20160351398
- Publication date Dec 1, 2016
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPING METHOD AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD
- Publication number 20160189963
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPING METHOD, DOPING APPARATUS AND METHOD OF MANUFACTURING SEMICON...
- Publication number 20150187582
- Publication date Jul 2, 2015
- TOKYO ELECTRON LIMITED
- Hirokazu UEDA
- H01 - BASIC ELECTRIC ELEMENTS