Yasuhiro Yamaguchi

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Insulating film forming method for semiconductor device interconnec...
- Patent number 5,275,977
- Issue date Jan 4, 1994
- Hitachi, Ltd.
- Toru Otsubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus and method for plasma processing
- Patent number 5,134,965
- Issue date Aug 4, 1992
- Hitachi, Ltd.
- Mitsuo Tokuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for plasma processing
- Patent number 4,985,109
- Issue date Jan 15, 1991
- Hitachi, Ltd.
- Toru Otsubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 4,776,918
- Issue date Oct 11, 1988
- Hitachi, Ltd.
- Toru Otsubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for winding wire around toroidal core
- Patent number 4,424,939
- Issue date Jan 10, 1984
- Hitachi, Ltd.
- Toshijiro Ohashi
- H01 - BASIC ELECTRIC ELEMENTS