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Yasuhiro Yamakage
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Kyoto, JP
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last 30 patents
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Patent Grant
Focused ion beam etching apparatus
Patent number
5,518,595
Issue date
May 21, 1996
Shimadzu Corporation
Yasuhiro Yamakage
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus for focusing an ion beam
Patent number
5,393,985
Issue date
Feb 28, 1995
Shimadzu Corporation
Yasuhiro Yamakage
H01 - BASIC ELECTRIC ELEMENTS