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Patents Grants
last 30 patents
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
11,822,240
Issue date
Nov 21, 2023
Tokyo Ohka Kogyo Co., Ltd.
Yasuhiro Yoshii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
11,650,497
Issue date
May 16, 2023
Tokyo Ohka Kogyo Co., Ltd.
Yasuhiro Yoshii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
11,586,111
Issue date
Feb 21, 2023
Tokyo Ohka Kogyo Co., Ltd.
Yasuhiro Yoshii
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
11,392,033
Issue date
Jul 19, 2022
Tokyo Ohka Kogyo Co., Ltd.
Hitoshi Yamano
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
11,275,306
Issue date
Mar 15, 2022
Tokyo Ohka Kogyo Co., Ltd.
Takahiro Kojima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
11,187,981
Issue date
Nov 30, 2021
Tokyo Ohka Kogyo Co., Ltd.
Yoichi Hori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Compound and method of producing the same, acid generator, resist c...
Patent number
9,040,220
Issue date
May 26, 2015
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Compound and method of producing the same, acid generator, resist c...
Patent number
9,034,556
Issue date
May 19, 2015
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist composition for immersion exposure and method of forming res...
Patent number
8,900,788
Issue date
Dec 2, 2014
Tokyo Ohka Kogyo Co., Ltd.
Yoshiyuki Utsumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming resist pattern and resist composition
Patent number
8,877,432
Issue date
Nov 4, 2014
Tokyo Ohka Kogyo Co., Ltd.
Jiro Yokoya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition for immersion exposure, method of forming resist...
Patent number
8,530,598
Issue date
Sep 10, 2013
Tokyo Ohka Kogyo Co., Ltd.
Masaru Takeshita
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Positive resist composition and method of forming resist pattern
Patent number
8,486,605
Issue date
Jul 16, 2013
Tokyo Ohka Kogyo Co., Ltd.
Masaru Takeshita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist composition and method of forming resist pattern
Patent number
8,338,075
Issue date
Dec 25, 2012
Tokyo Ohka Kogyo Co., Ltd.
Masaru Takeshita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition for immersion exposure, method of forming resist...
Patent number
8,247,161
Issue date
Aug 21, 2012
Tokyo Ohka Kogyo Co., Ltd.
Masaru Takeshita
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Compound, acid generator, resist composition, and method of forming...
Patent number
8,227,169
Issue date
Jul 24, 2012
Tokyo Ohka Kogyo Co., Ltd.
Akiya Kawaue
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive resist composition and method of forming resist pattern
Patent number
8,105,747
Issue date
Jan 31, 2012
Tokyo Ohka Kogyo Co., Ltd.
Yoshiyuki Utsumi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
8,012,669
Issue date
Sep 6, 2011
Tokyo Ohka Kogyo Co., Ltd.
Hiroaki Shimizu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist composition for immersion lithography and method fo...
Patent number
7,799,507
Issue date
Sep 21, 2010
Tokyo Ohka Co., Ltd.
Kotaro Endo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist composition for immersion lithography and method fo...
Patent number
7,494,762
Issue date
Feb 24, 2009
Tokyo Ohka Kogyo Co., Ltd.
Makiko Irie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20210200086
Publication date
Jul 1, 2021
Tokyo Ohka Kogyo Co., Ltd.
Mari MURATA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20210200087
Publication date
Jul 1, 2021
Tokyo Ohka Kogyo Co., Ltd.
Yoichi HORI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20210191262
Publication date
Jun 24, 2021
Tokyo Ohka Kogyo Co., Ltd.
Yasuhiro YOSHII
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20210165324
Publication date
Jun 3, 2021
Tokyo Ohka Kogyo Co., Ltd.
Yosuke SUZUKI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20200183275
Publication date
Jun 11, 2020
Tokyo Ohka Kogyo Co., Ltd.
Takahiro KOJIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20200174369
Publication date
Jun 4, 2020
Tokyo Ohka Kogyo Co., Ltd.
Yasuhiro YOSHII
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20200166837
Publication date
May 28, 2020
Tokyo Ohka Kogyo Co., Ltd.
Yasuhiro YOSHII
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20200150531
Publication date
May 14, 2020
Tokyo Ohka Kogyo Co., Ltd.
Yoichi HORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20190204738
Publication date
Jul 4, 2019
Tokyo Ohka Kogyo Co., Ltd.
Hitoshi YAMANO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20190196330
Publication date
Jun 27, 2019
Tokyo Ohka Kogyo Co., Ltd.
Yoichi HORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NOVEL COMPOUND AND METHOD OF PRODUCING THE SAME, ACID GENERATOR, RE...
Publication number
20120164580
Publication date
Jun 28, 2012
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
RESIST COMPOSITION FOR IMMERSION EXPOSURE, METHOD OF FORMING RESIST...
Publication number
20120116038
Publication date
May 10, 2012
Masaru Takeshita
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
METHOD OF FORMING RESIST PATTERN AND RESIST COMPOSITION
Publication number
20110262872
Publication date
Oct 27, 2011
Tokyo Ohka Kogyo Co., Ltd.
Jiro Yokoya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20100190108
Publication date
Jul 29, 2010
Tokyo Ohka Kogyo Co., Ltd.
Masaru Takeshita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Resist composition for immersion exposure, method of forming resist...
Publication number
20100143844
Publication date
Jun 10, 2010
Masaru Takeshita
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
COMPOUND, ACID GENERATOR, RESIST COMPOSITION, AND METHOD OF FORMING...
Publication number
20100104973
Publication date
Apr 29, 2010
Tokyo Ohka Kogyo Co., Ltd.
Akiya Kawaue
C07 - ORGANIC CHEMISTRY
Information
Patent Application
POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20100075249
Publication date
Mar 25, 2010
Tokyo Ohka Kogyo Co., Ltd.
Yoshiyuki Utsumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20100047724
Publication date
Feb 25, 2010
Tokyo Ohka Kogyo Co., Ltd.
Masaru Takeshita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20090226842
Publication date
Sep 10, 2009
Tokyo Ohka Kogyo Co., Ltd.
Hiroaki Shimizu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NOVEL COMPOUND AND METHOD OF PRODUCING THE SAME, ACID GENERATOR, RE...
Publication number
20090162788
Publication date
Jun 25, 2009
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
POSITIVE RESIST COMPOSITION FOR IMMERSION LITHOGRAPHY AND METHOD FO...
Publication number
20090117490
Publication date
May 7, 2009
Tokyo OhkaKogyo Co., Ltd.
Kotaro Endo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE RESIST COMPOSITION FOR IMMERSION LITHOGRAPHY AND METHOD FO...
Publication number
20080090171
Publication date
Apr 17, 2008
Tokyo Ohka Kogyo Co., Ltd.
Makiko Irie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY