Yasuhiro Yoshitake

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus and pattern chip
- Patent number 10,955,361
- Issue date Mar 23, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuta Urano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection device, pattern chip, and defect inspection method
- Patent number 10,948,424
- Issue date Mar 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuta Urano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical inspection tool and method
- Patent number 10,853,959
- Issue date Dec 1, 2020
- SanDisk Technologies LLC
- Yasuhiro Yoshitake
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Distance measuring device and distance measuring method
- Patent number 8,982,332
- Issue date Mar 17, 2015
- Hitachi, Ltd.
- Takehiro Tachizaki
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection device of substrate surface and pattern inspecti...
- Patent number 8,736,830
- Issue date May 27, 2014
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
DUV-UV band spectroscopic optical system and spectrometer using same
- Patent number 8,730,471
- Issue date May 20, 2014
- Hitachi, Ltd.
- Keiko Oka
- G11 - INFORMATION STORAGE
Information Patent Grant
Wavefront aberration measuring method and device therefor
- Patent number 8,705,024
- Issue date Apr 22, 2014
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection system
- Patent number 8,660,336
- Issue date Feb 25, 2014
- Hitachi High-Technologies Corporation
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring displacement of a sample using a...
- Patent number 8,659,761
- Issue date Feb 25, 2014
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Method and equipment for detecting pattern defect
- Patent number 8,553,214
- Issue date Oct 8, 2013
- Hitachi, Ltd.
- Hiroaki Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection device using catadioptric objective lens
- Patent number 8,553,216
- Issue date Oct 8, 2013
- Hitachi, Ltd.
- Keiko Yoshimizu
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection apparatus and method
- Patent number 8,416,292
- Issue date Apr 9, 2013
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects
- Patent number 8,416,402
- Issue date Apr 9, 2013
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects
- Patent number 8,411,264
- Issue date Apr 2, 2013
- Hitachi High-Technologies Corporation
- Takeo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Spectral detection method and device, and defect inspection method...
- Patent number 8,279,431
- Issue date Oct 2, 2012
- Hitachi, Ltd.
- Takenori Hirose
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection system
- Patent number 8,275,189
- Issue date Sep 25, 2012
- Hitachi High-Technologies Corporation
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Magnetic recording disk having aligning pattern and method for alig...
- Patent number 8,259,414
- Issue date Sep 4, 2012
- Hitachi Global Storage Technologies Netherlands B.V.
- Takenori Hirose
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of measuring pattern shape, method of manufacturing semicond...
- Patent number 8,227,265
- Issue date Jul 24, 2012
- Renesas Electronics Corporation
- Kana Nemoto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects
- Patent number 8,203,706
- Issue date Jun 19, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects of patterns formed on a...
- Patent number 8,148,705
- Issue date Apr 3, 2012
- Hitachi, Ltd.
- Takenori Hirose
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for inspecting defects
- Patent number 8,121,398
- Issue date Feb 21, 2012
- Hitachi High-Technologies Corporation
- Yasuhiro Yoshitake
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and apparatus for measuring displacement of a sample to be i...
- Patent number 8,064,066
- Issue date Nov 22, 2011
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reviewing defect
- Patent number 8,045,146
- Issue date Oct 25, 2011
- Hitachi High-Technologies Corporation
- Keiya Saito
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for optically arranging surface of alignment film and met...
- Patent number 7,894,029
- Issue date Feb 22, 2011
- Hitachi Displays, Ltd.
- Takeshi Arai
- G02 - OPTICS
Information Patent Grant
Defect inspection system
- Patent number 7,881,520
- Issue date Feb 1, 2011
- Hitachi High-Technologies Corporation
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Method and equipment for detecting pattern defect
- Patent number 7,791,725
- Issue date Sep 7, 2010
- Hitachi, Ltd.
- Hiroaki Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a semiconductor device
- Patent number 7,643,140
- Issue date Jan 5, 2010
- Hitachi High-Technologies Corporation
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring displacement of a sample
- Patent number 7,612,889
- Issue date Nov 3, 2009
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Method for optically detecting height of a specimen and charged par...
- Patent number 7,599,076
- Issue date Oct 6, 2009
- Hitachi High-Technologies Corporation
- Keiya Saito
- G01 - MEASURING TESTING
Information Patent Grant
Method and equipment for detecting pattern defect
- Patent number 7,456,963
- Issue date Nov 25, 2008
- Hitachi, Ltd.
- Hiroaki Shishido
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL INSPECTION TOOL AND METHOD
- Publication number 20200311955
- Publication date Oct 1, 2020
- SANDISK TECHNOLOGIES LLC
- Yasuhiro Yoshitake
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION APPARATUS AND PATTERN CHIP
- Publication number 20200182804
- Publication date Jun 11, 2020
- Hitachi High-Technologies Corporation
- Yuta URANO
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION DEVICE, PATTERN CHIP, AND DEFECT INSPECTION METHOD
- Publication number 20190107498
- Publication date Apr 11, 2019
- Hitachi High-Technologies Corporation
- Yuta URANO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION SYSTEM
- Publication number 20130058558
- Publication date Mar 7, 2013
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Application
Distance Measuring Device and Distance Measuring Method
- Publication number 20130003038
- Publication date Jan 3, 2013
- Hitachi, Ltd
- Takehiro Tachizaki
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION DEVICE USING CATADIOPTRIC OBJECTIVE LENS
- Publication number 20120281207
- Publication date Nov 8, 2012
- Keiko Yoshimizu
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING DEFECTS
- Publication number 20120236296
- Publication date Sep 20, 2012
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE TO BE I...
- Publication number 20120062903
- Publication date Mar 15, 2012
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Application
WAVEFRONT ABERRATION MEASURING METHOD AND DEVICE THEREFOR
- Publication number 20120019813
- Publication date Jan 26, 2012
- HITACHI, LTD.
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
- Publication number 20120019816
- Publication date Jan 26, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
PATTERN INSPECTION DEVICE OF SUBSTRATE SURFACE AND PATTERN INSPECTI...
- Publication number 20120013890
- Publication date Jan 19, 2012
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECT
- Publication number 20120008132
- Publication date Jan 12, 2012
- Keiya SAITO
- G02 - OPTICS
Information Patent Application
DUV-UV BAND SPECTROSCOPIC OPTICAL SYSTEM AND SPECTROMETER USING SAME
- Publication number 20110279820
- Publication date Nov 17, 2011
- Keiko Oka
- G02 - OPTICS
Information Patent Application
Adjustable Beam Size Illumination Optical Apparatus and Beam Size A...
- Publication number 20110228537
- Publication date Sep 22, 2011
- HITACHI VIA MECHANICS, LTD.
- Keiko YOSHIMIZU
- G02 - OPTICS
Information Patent Application
DEFECT INSPECTION SYSTEM
- Publication number 20110069895
- Publication date Mar 24, 2011
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING PATTERN SHAPE, METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110020956
- Publication date Jan 27, 2011
- Renesas Electronics Corporation
- Kana NEMOTO
- G01 - MEASURING TESTING
Information Patent Application
Method And Equipment For Detecting Pattern Defect
- Publication number 20110001972
- Publication date Jan 6, 2011
- Hiroaki Shishido
- G02 - OPTICS
Information Patent Application
SPECTRAL DETECTION METHOD AND DEVICE, AND DEFECT INSPECTION METHOD...
- Publication number 20100182589
- Publication date Jul 22, 2010
- Hitachi, Ltd.
- Takenori HIROSE
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE
- Publication number 20100039652
- Publication date Feb 18, 2010
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Inspecting Defects
- Publication number 20100014075
- Publication date Jan 21, 2010
- Hitachi High-Technologies Corporation
- Takeo Ueno
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Inspecting Defects
- Publication number 20100014083
- Publication date Jan 21, 2010
- Hitachi High-Technologies Corporation
- Takeo Ueno
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING DEFECTS
- Publication number 20090279079
- Publication date Nov 12, 2009
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Inspecting Defects
- Publication number 20090257647
- Publication date Oct 15, 2009
- Yasuhiro Yoshitake
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION APPARATUS AND METHOD
- Publication number 20090213215
- Publication date Aug 27, 2009
- Yukihiro Shibata
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting defects of patterns formed on a...
- Publication number 20090161244
- Publication date Jun 25, 2009
- Takenori Hirose
- G01 - MEASURING TESTING
Information Patent Application
Method And Equipment For Detecting Pattern Defect
- Publication number 20090073443
- Publication date Mar 19, 2009
- Hiroaki Shishido
- G02 - OPTICS
Information Patent Application
Method and Apparatus for Reviewing Defect
- Publication number 20090002695
- Publication date Jan 1, 2009
- Keiya SAITO
- G02 - OPTICS
Information Patent Application
Hard disk media having alignment pattern and alignment method
- Publication number 20080298222
- Publication date Dec 4, 2008
- Takenori Hirose
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING A SEMICONDUCTOR DEVICE
- Publication number 20080239289
- Publication date Oct 2, 2008
- Taketo UENO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTING DEFECTS
- Publication number 20080068593
- Publication date Mar 20, 2008
- HIROYUKI NAKANO
- G01 - MEASURING TESTING

Yasuhiro Yoshitake

Person

Patents Grantslast 30 patents

Defect inspection apparatus and pattern chip

Defect inspection device, pattern chip, and defect inspection method

Optical inspection tool and method

Distance measuring device and distance measuring method

Pattern inspection device of substrate surface and pattern inspecti...

DUV-UV band spectroscopic optical system and spectrometer using same

Wavefront aberration measuring method and device therefor

Defect inspection system

Method and apparatus for measuring displacement of a sample using a...

Method and equipment for detecting pattern defect

Defect inspection device using catadioptric objective lens

Defect inspection apparatus and method

Method and apparatus for inspecting defects

Method and apparatus for inspecting defects

Spectral detection method and device, and defect inspection method...

Defect inspection system

Magnetic recording disk having aligning pattern and method for alig...

Method of measuring pattern shape, method of manufacturing semicond...

Method and apparatus for inspecting defects

Method and apparatus for inspecting defects of patterns formed on a...

Method and apparatus for inspecting defects

Method and apparatus for measuring displacement of a sample to be i...

Method and apparatus for reviewing defect

Apparatus for optically arranging surface of alignment film and met...

Defect inspection system

Method and equipment for detecting pattern defect

Method and apparatus for inspecting a semiconductor device

Method and apparatus for measuring displacement of a sample

Method for optically detecting height of a specimen and charged par...

Method and equipment for detecting pattern defect

Patents Applicationslast 30 patents

OPTICAL INSPECTION TOOL AND METHOD

DEFECT INSPECTION APPARATUS AND PATTERN CHIP

DEFECT INSPECTION DEVICE, PATTERN CHIP, AND DEFECT INSPECTION METHOD

DEFECT INSPECTION SYSTEM

Distance Measuring Device and Distance Measuring Method

DEFECT INSPECTION DEVICE USING CATADIOPTRIC OBJECTIVE LENS

METHOD AND APPARATUS FOR INSPECTING DEFECTS

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE TO BE I...

WAVEFRONT ABERRATION MEASURING METHOD AND DEVICE THEREFOR

DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS

PATTERN INSPECTION DEVICE OF SUBSTRATE SURFACE AND PATTERN INSPECTI...

METHOD AND APPARATUS FOR REVIEWING DEFECT

DUV-UV BAND SPECTROSCOPIC OPTICAL SYSTEM AND SPECTROMETER USING SAME

Adjustable Beam Size Illumination Optical Apparatus and Beam Size A...

DEFECT INSPECTION SYSTEM

METHOD OF MEASURING PATTERN SHAPE, METHOD OF MANUFACTURING SEMICOND...

Method And Equipment For Detecting Pattern Defect

SPECTRAL DETECTION METHOD AND DEVICE, AND DEFECT INSPECTION METHOD...

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT OF A SAMPLE

Method and Apparatus for Inspecting Defects

Method and Apparatus for Inspecting Defects

METHOD AND APPARATUS FOR INSPECTING DEFECTS

Method and Apparatus for Inspecting Defects

DEFECT INSPECTION APPARATUS AND METHOD

Method and apparatus for inspecting defects of patterns formed on a...

Method And Equipment For Detecting Pattern Defect

Method and Apparatus for Reviewing Defect

Hard disk media having alignment pattern and alignment method

METHOD AND APPARATUS FOR INSPECTING A SEMICONDUCTOR DEVICE

METHOD AND APPARATUS FOR DETECTING DEFECTS