Yasuhisa KUDO

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 10,515,786
- Issue date Dec 24, 2019
- Tokyo Electron Limited
- Shingo Koiwa
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Mounting table and plasma processing apparatus
- Patent number 10,340,174
- Issue date Jul 2, 2019
- Tokyo Electron Limited
- Shin Yamaguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for adjoining adjacent coatings on a processing element
- Patent number 7,560,376
- Issue date Jul 14, 2009
- Tokyo Electron Limited
- Gary Escher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY AND PLASMA PROCESSING APPARATUS
- Publication number 20230073711
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Yuki AHIKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20170092472
- Publication date Mar 30, 2017
- Shingo KOIWA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
MOUNTING TABLE AND PLASMA PROCESSING APPARATUS
- Publication number 20140202635
- Publication date Jul 24, 2014
- TOKYO ELECTRON LIMITED
- Shin YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for adjoining adjacent coatings on a processing element
- Publication number 20070142956
- Publication date Jun 21, 2007
- Gary Escher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...