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Yasuhisa Oana
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Yokohama, JP
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last 30 patents
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Patent Grant
Sputtering alloy target and method of producing an alloy film
Patent number
4,963,240
Issue date
Oct 16, 1990
Kabushiki Kaisha Toshiba
Yoshiharu Fukasawa
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...