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Yasuhisa Tani
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Projection exposure apparatus, cleaning and maintenance methods of...
Patent number
8,724,076
Issue date
May 13, 2014
Nikon Corporation
Yasuhisa Tani
B08 - CLEANING
Information
Patent Grant
Projection exposure apparatus, cleaning and maintenance methods of...
Patent number
8,035,797
Issue date
Oct 11, 2011
Nikon Corporation
Yasuhisa Tani
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS AND CLEANING METHOD
Publication number
20130201460
Publication date
Aug 8, 2013
Nikon Corporation
Yasuhisa Tani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection exposure apparatus, cleaning and maintenance methods of...
Publication number
20110170080
Publication date
Jul 14, 2011
Nikon Corporation
Yasuhisa Tani
B08 - CLEANING
Information
Patent Application
OPTICAL MEMBER, LIGHT ROUTING UNIT, AND EXPOSURE APPARATUS
Publication number
20090244507
Publication date
Oct 1, 2009
Nikon Corporation
Yasuhisa TANI
G02 - OPTICS
Information
Patent Application
Surface treatment method and surface treatment apparatus, exposure...
Publication number
20080117401
Publication date
May 22, 2008
Nikon Corporation
Yasuhisa Tani
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection exposure apparatus, cleaning and maintenance methods of...
Publication number
20060232757
Publication date
Oct 19, 2006
Nikon Corporation
Yasuhisa Tani
B08 - CLEANING