Yasuhito Saiga

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method, film forming apparatus and pattern forming method
- Patent number 8,889,337
- Issue date Nov 18, 2014
- Tokyo Electron Limited
- Hitoshi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transfer method for performing processes including photol...
- Patent number 8,702,370
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Yuichi Yamamoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system and substrate transfer method
- Patent number 8,236,132
- Issue date Aug 7, 2012
- Tokyo Electron Limited
- Yuichi Yamamoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pattern forming method and apparatus
- Patent number 8,133,663
- Issue date Mar 13, 2012
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, program, computer-readable storage med...
- Patent number 8,007,968
- Issue date Aug 30, 2011
- Tokyo Electron Limited
- Yoshiaki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, program, computer-readable recording m...
- Patent number 7,901,149
- Issue date Mar 8, 2011
- Tokyo Electron Limited
- Yoshiaki Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Circulation system for high refractive index liquid in pattern form...
- Patent number 7,826,032
- Issue date Nov 2, 2010
- Tokyo Electron Limited
- Taro Yamamoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Edge exposure apparatus, coating and developing apparatus, edge exp...
- Patent number 7,651,285
- Issue date Jan 26, 2010
- Tokyo Electron Limited
- Hitoshi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER METHOD FOR PERFORMING PROCESSES INCLUDING PHOTOL...
- Publication number 20120251957
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Yuichi Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE STORAGE MED...
- Publication number 20090258304
- Publication date Oct 15, 2009
- TOKYO ELECTRON LIMITED
- Yoshiaki Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE RECORDING M...
- Publication number 20090208879
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Yoshiaki Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD
- Publication number 20090185151
- Publication date Jul 23, 2009
- TOKYO ELECTRON LIMITED
- Yuichi Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS AND PATTERN FORMING METHOD
- Publication number 20080118861
- Publication date May 22, 2008
- TOKYO ELECTRON LIMITED
- Hitoshi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Edge exposure apparatus, coating and developing apparatus, edge exp...
- Publication number 20080088809
- Publication date Apr 17, 2008
- TOKYO ELECTRON LIMITED
- Hitoshi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING METHOD AND APPARATUS
- Publication number 20080038671
- Publication date Feb 14, 2008
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CIRCULATION SYSTEM FOR HIGH REFRACTIVE INDEX LIQUID IN PATTERN FORM...
- Publication number 20080018868
- Publication date Jan 24, 2008
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yasuhito Saiga

Person

Patents Grantslast 30 patents

Film forming method, film forming apparatus and pattern forming method

Substrate transfer method for performing processes including photol...

Substrate processing system and substrate transfer method

Pattern forming method and apparatus

Substrate processing method, program, computer-readable storage med...

Substrate processing method, program, computer-readable recording m...

Circulation system for high refractive index liquid in pattern form...

Edge exposure apparatus, coating and developing apparatus, edge exp...

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER METHOD FOR PERFORMING PROCESSES INCLUDING PHOTOL...

SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE STORAGE MED...

SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE RECORDING M...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER METHOD

FILM FORMING METHOD, FILM FORMING APPARATUS AND PATTERN FORMING METHOD

Edge exposure apparatus, coating and developing apparatus, edge exp...

PATTERN FORMING METHOD AND APPARATUS

CIRCULATION SYSTEM FOR HIGH REFRACTIVE INDEX LIQUID IN PATTERN FORM...