Yasuhito Sasaki

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Stage device including a heat insulating sheet supported by an auxi...
- Patent number 8,891,054
- Issue date Nov 18, 2014
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, exposure apparatus, and microdevice manufacturing method
- Patent number 8,102,500
- Issue date Jan 24, 2012
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plane motor device with surrounding member surrounding coil unit an...
- Patent number 7,408,276
- Issue date Aug 5, 2008
- Canon Kabushiki Kaisha
- Hitoshi Sato
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus, exposure system using the same, and device manufac...
- Patent number 7,391,495
- Issue date Jun 24, 2008
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus, exposure apparatus, and device manufacturing method
- Patent number 7,321,418
- Issue date Jan 22, 2008
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, exposure apparatus, and device manufacturing...
- Patent number 7,312,848
- Issue date Dec 25, 2007
- Canon Kabushiki Kaisha
- Hideo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and exposure apparatus
- Patent number 7,301,602
- Issue date Nov 27, 2007
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, exposure apparatus, and device manufacturing method
- Patent number 7,224,432
- Issue date May 29, 2007
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Stage device including a heat insulating sheet supported by an auxi...
- Publication number 20120086931
- Publication date Apr 12, 2012
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE DEVICE, EXPOSURE APPARATUS, AND MICRODEVICE MANUFACTURING METHOD
- Publication number 20070273861
- Publication date Nov 29, 2007
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning apparatus, exposure apparatus, and device manufacturing...
- Publication number 20060209287
- Publication date Sep 21, 2006
- Hideo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and device manufacturing method
- Publication number 20060082754
- Publication date Apr 20, 2006
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device, exposure apparatus, and device manufacturing method
- Publication number 20050254036
- Publication date Nov 17, 2005
- Canon Kabushiki Kaisha
- Yasuhito Sasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus and exprosure apparatus
- Publication number 20050219501
- Publication date Oct 6, 2005
- Canon Kabushiki Kaisha
- Hitoshi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure system using the same, and device manufac...
- Publication number 20040223133
- Publication date Nov 11, 2004
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Plane motor device with surrounding member surrounding coil unit an...
- Publication number 20040222707
- Publication date Nov 11, 2004
- Canon Kabushiki Kaisha
- Hitoshi Sato
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Yasuhito Sasaki

Person

Patents Grantslast 30 patents

Stage device including a heat insulating sheet supported by an auxi...

Stage device, exposure apparatus, and microdevice manufacturing method

Plane motor device with surrounding member surrounding coil unit an...

Stage apparatus, exposure system using the same, and device manufac...

Stage apparatus, exposure apparatus, and device manufacturing method

Positioning apparatus, exposure apparatus, and device manufacturing...

Stage apparatus and exposure apparatus

Stage device, exposure apparatus, and device manufacturing method

Patents Applicationslast 30 patents

Stage device including a heat insulating sheet supported by an auxi...

STAGE DEVICE, EXPOSURE APPARATUS, AND MICRODEVICE MANUFACTURING METHOD

Positioning apparatus, exposure apparatus, and device manufacturing...

Stage apparatus, exposure apparatus, and device manufacturing method

Stage device, exposure apparatus, and device manufacturing method

Stage apparatus and exprosure apparatus

Stage apparatus, exposure system using the same, and device manufac...

Plane motor device with surrounding member surrounding coil unit an...