Yasuko Tabata

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Patents Grantslast 30 patents

Information Patent Grant
Levenson type phase shift photomask and manufacture method of semic...
- Patent number 5,994,004
- Issue date Nov 30, 1999
- Fujitsu Limited
- Yasuko Tabata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern exposing method using phase shift and mask used therefor
- Patent number 5,472,813
- Issue date Dec 5, 1995
- Fujitsu Limited
- Kenji Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern exposing method using phase shift and mask used therefor
- Patent number 5,364,716
- Issue date Nov 15, 1994
- Fujitsu Limited
- Kenji Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY