Yasumi SAGO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Magnetic field generating apparatus and plasma processing apparatus
- Patent number 8,231,767
- Issue date Jul 31, 2012
- Canon Anelva Corporation
- Kazuyuki Iori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface processing apparatus
- Patent number 8,007,633
- Issue date Aug 30, 2011
- Canon Anelva Corporation
- Akihiro Egami
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 7,976,716
- Issue date Jul 12, 2011
- Canon Anelva Corporation
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucking stage and substrate processing apparatus
- Patent number RE42175
- Issue date Mar 1, 2011
- Canon Anelva Corporation
- Yasumi Sago
- 118 - Coating apparatus
Information Patent Grant
High-frequency plasma processing apparatus
- Patent number 7,767,056
- Issue date Aug 3, 2010
- Canon Anelva Corporation
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck module and cooling system
- Patent number 7,615,133
- Issue date Nov 10, 2009
- Toto Ltd.
- Noriaki Tateno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,513,063
- Issue date Apr 7, 2009
- Canon Anelva Corporation
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-frequency plasma processing apparatus
- Patent number 7,323,081
- Issue date Jan 29, 2008
- Canon Anelva Corporation
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucking stage and substrate processing apparatus
- Patent number 7,220,319
- Issue date May 22, 2007
- Canon Anelva Corporation
- Yasumi Sago
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chucking stage and substrate processing apparatus
- Patent number 7,175,737
- Issue date Feb 13, 2007
- Canon Anelva Corporation
- Yasumi Sago
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Insulation-film etching system
- Patent number 7,025,855
- Issue date Apr 11, 2006
- Anelva Corporation
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Brine supply unit
- Patent number 7,011,744
- Issue date Mar 14, 2006
- Choshu Industry Co., Ltd.
- Tomio Takamura
- G05 - CONTROLLING REGULATING
Information Patent Grant
RF plasma processing method and RF plasma processing system
- Patent number 6,774,570
- Issue date Aug 10, 2004
- Anelva Corporation
- Nobuaki Tsuchiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostastic chuck
- Patent number 5,530,616
- Issue date Jun 25, 1996
- Toto Ltd.
- Tetsuo Kitabayashi
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
PLASMA TREATMENT APPARATUS
- Publication number 20120298303
- Publication date Nov 29, 2012
- Canon ANELVA Corporation
- Masayoshi IKEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MAGNETRON SPUTTERING APPARATUS AND ELECTRONIC COMPONENT MANUFACTURI...
- Publication number 20120073960
- Publication date Mar 29, 2012
- Canon ANELVA Corporation
- Yohsuke SHIBUYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface processing apparatus
- Publication number 20110174221
- Publication date Jul 21, 2011
- CANON ANELVA CORPORATION
- Akihiro Egami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC FIELD GENERATING APPARATUS AND PLASMA PROCESSING APPARATUS
- Publication number 20110121927
- Publication date May 26, 2011
- Canon ANELVA Corporation
- Kazuyuki Iori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF GENERATING FINE METAL PARTICLES, METHOD OF MANUFACTURING...
- Publication number 20100276275
- Publication date Nov 4, 2010
- Canon ANELVA Corporation
- Koichi SASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-Frequency Plasma Processing Apparatus
- Publication number 20100147801
- Publication date Jun 17, 2010
- Canon ANELVA Corporation
- Yasumi SAGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090197418
- Publication date Aug 6, 2009
- Canon ANELVA Corporation
- Yasumi SAGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROCESSING APPARATUS
- Publication number 20090173444
- Publication date Jul 9, 2009
- Canon ANELVA Corporation
- Yasumi Sago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface processing apparatus
- Publication number 20080156440
- Publication date Jul 3, 2008
- Canon ANELVA Corporation
- Yasumi Sago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface processing apparatus
- Publication number 20080113149
- Publication date May 15, 2008
- ANELVA CORPORATION
- Akihiro Egami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface Processing Apparatus
- Publication number 20080053614
- Publication date Mar 6, 2008
- Canon ANELVA Corporation
- Yasumi Sago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High-Frequency Plasma Processing Apparatus
- Publication number 20080053615
- Publication date Mar 6, 2008
- Canon ANELVA Corporation
- Yasumi SAGO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electro-Static Chucking Mechanism and Surface Processing Apparatus
- Publication number 20080014363
- Publication date Jan 17, 2008
- Canon ANELVA Corporation
- Yasumi SAGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic clampless holder module and cooling system
- Publication number 20050127619
- Publication date Jun 16, 2005
- Noriaki Tateno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-frequency plasma processing apparatus
- Publication number 20040134616
- Publication date Jul 15, 2004
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chucking stage and substrate processing apparatus
- Publication number 20030222416
- Publication date Dec 4, 2003
- Yasumi Sago
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Brine supply unit
- Publication number 20030209609
- Publication date Nov 13, 2003
- Tomio Takamura
- G05 - CONTROLLING REGULATING
Information Patent Application
Electrostatic chucking stage and substrate processing apparatus
- Publication number 20030198005
- Publication date Oct 23, 2003
- Yasumi Sago
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate processing apparatus
- Publication number 20030159307
- Publication date Aug 28, 2003
- ANELVA CORPORATION
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Insulation-film etching system
- Publication number 20030159779
- Publication date Aug 28, 2003
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF plasma processing method and RF plasma processing system
- Publication number 20030151372
- Publication date Aug 14, 2003
- Nobuaki Tsuchiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface processing apparatus
- Publication number 20030047282
- Publication date Mar 13, 2003
- Yasumi Sago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Surface processing apparatus
- Publication number 20030024478
- Publication date Feb 6, 2003
- ANELVA CORPORATION
- Akihiro Egami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electro-static chucking mechanism and surface processing apparatus
- Publication number 20010054389
- Publication date Dec 27, 2001
- Yasumi Sago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma-enhanced processing apparatus
- Publication number 20010030024
- Publication date Oct 18, 2001
- ANELVA CORPORATION
- Yasumi Sago
- H01 - BASIC ELECTRIC ELEMENTS

Yasumi SAGO

Person

Patents Grantslast 30 patents

Magnetic field generating apparatus and plasma processing apparatus

Surface processing apparatus

Semiconductor device manufacturing method

Electrostatic chucking stage and substrate processing apparatus

High-frequency plasma processing apparatus

Electrostatic chuck module and cooling system

Substrate processing apparatus

High-frequency plasma processing apparatus

Electrostatic chucking stage and substrate processing apparatus

Electrostatic chucking stage and substrate processing apparatus

Insulation-film etching system

Brine supply unit

RF plasma processing method and RF plasma processing system

Electrostastic chuck

Patents Applicationslast 30 patents

PLASMA TREATMENT APPARATUS

MAGNETRON SPUTTERING APPARATUS AND ELECTRONIC COMPONENT MANUFACTURI...

Surface processing apparatus

MAGNETIC FIELD GENERATING APPARATUS AND PLASMA PROCESSING APPARATUS

METHOD OF GENERATING FINE METAL PARTICLES, METHOD OF MANUFACTURING...

High-Frequency Plasma Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

SURFACE PROCESSING APPARATUS

Surface processing apparatus

Surface processing apparatus

Surface Processing Apparatus

High-Frequency Plasma Processing Apparatus

Electro-Static Chucking Mechanism and Surface Processing Apparatus

Electrostatic clampless holder module and cooling system

High-frequency plasma processing apparatus

Electrostatic chucking stage and substrate processing apparatus

Brine supply unit

Electrostatic chucking stage and substrate processing apparatus

Substrate processing apparatus

Insulation-film etching system

RF plasma processing method and RF plasma processing system

Surface processing apparatus

Surface processing apparatus

Electro-static chucking mechanism and surface processing apparatus

Plasma-enhanced processing apparatus