Yasunao Oyama

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Crystallization method and crystallization apparatus
- Patent number 7,875,118
- Issue date Jan 25, 2011
- Canon Kabushiki Kaisha
- Yasunao Oyama
- G02 - OPTICS
Information Patent Grant
Optical member for vacuum ultraviolet, and aligner and device manuf...
- Patent number 6,813,070
- Issue date Nov 2, 2004
- Canon Kabushiki Kaisha
- Yasunao Oyama
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
CRYSTALLIZATION METHOD AND CRYSTALLIZATION APPARATUS
- Publication number 20080134962
- Publication date Jun 12, 2008
- Yasunao OYAMA
- C30 - CRYSTAL GROWTH
Information Patent Application
Crystallization method and crystallization apparatus
- Publication number 20050241569
- Publication date Nov 3, 2005
- Yasunao Oyama
- C30 - CRYSTAL GROWTH
Information Patent Application
Optical member for vacuum ultraviolet, and aligner and device manuf...
- Publication number 20010053017
- Publication date Dec 20, 2001
- Yasunao Oyama
- G02 - OPTICS