Yasunari Motoki

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Microwave plasma processing process and apparatus
- Patent number RE36224
- Issue date Jun 8, 1999
- Fujitsu Limited
- Shuzo Fujimura
- 204 - Chemistry: electrical and wave energy
Information Patent Grant
Microwave plasma processing process and apparatus
- Patent number 5,364,519
- Issue date Nov 15, 1994
- Fujitsu Limited
- Shuzo Fujimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Downstream microwave plasma processing apparatus having an improved...
- Patent number 4,987,284
- Issue date Jan 22, 1991
- Fujitsu Limited
- Shuzo Fujimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of removing photoresist on a semiconductor wafer
- Patent number 4,938,839
- Issue date Jul 3, 1990
- Fujitsu Limited
- Shuzo Fujimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spin dryer
- Patent number 4,637,146
- Issue date Jan 20, 1987
- Fujitsu Limited
- Yasunari Motoki
- F26 - DRYING