Yasunari Sohda

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Calibration sample, electron beam adjustment method and electron be...
- Patent number 11,435,178
- Issue date Sep 6, 2022
- HITACHI HIGH-TECH CORPORATION
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 11,276,551
- Issue date Mar 15, 2022
- Hitachi, Ltd.
- Atsuko Shintani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 11,251,018
- Issue date Feb 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and electron beam application device
- Patent number 11,227,740
- Issue date Jan 18, 2022
- HITACHI HIGH-TECH CORPORATION
- Soichiro Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 10,825,649
- Issue date Nov 3, 2020
- Hitachi, Ltd.
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for measuring patterns
- Patent number 10,692,693
- Issue date Jun 23, 2020
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,636,618
- Issue date Apr 28, 2020
- Hitachi High-Technologies Corporation
- Kaori Bizen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device and sample inspection method
- Patent number 10,629,405
- Issue date Apr 21, 2020
- Hitachi, Ltd.
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,559,450
- Issue date Feb 11, 2020
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction method, aberration correction system, and cha...
- Patent number 10,446,361
- Issue date Oct 15, 2019
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,134,558
- Issue date Nov 20, 2018
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and method for controlling same
- Patent number 10,014,160
- Issue date Jul 3, 2018
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam device
- Patent number 9,960,006
- Issue date May 1, 2018
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and detection method using said device
- Patent number 9,799,483
- Issue date Oct 24, 2017
- Hitachi High-Technologies Corporation
- Tomoyasu Shojo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron beam device with focus adjustment based on accele...
- Patent number 9,644,955
- Issue date May 9, 2017
- Hitachi High-Technologies Corporation
- Tasuku Yano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam equipment
- Patent number 9,543,053
- Issue date Jan 10, 2017
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Pattern critical dimension measurement equipment and method for mea...
- Patent number 9,520,266
- Issue date Dec 13, 2016
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam device
- Patent number 9,443,695
- Issue date Sep 13, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,312,091
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam microscope
- Patent number 9,261,360
- Issue date Feb 16, 2016
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle instrument
- Patent number 9,230,775
- Issue date Jan 5, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for measuring displacement between patterns an...
- Patent number 9,000,366
- Issue date Apr 7, 2015
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,969,801
- Issue date Mar 3, 2015
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern evaluation method, device therefor, and electron beam device
- Patent number 8,816,277
- Issue date Aug 26, 2014
- Hitachi High-Technologies Corporation
- Hiromasa Yamanashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 8,766,183
- Issue date Jul 1, 2014
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 8,742,342
- Issue date Jun 3, 2014
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 8,735,814
- Issue date May 27, 2014
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,704,175
- Issue date Apr 22, 2014
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and inspection method using same
- Patent number 8,637,820
- Issue date Jan 28, 2014
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam measurement apparatus
- Patent number 8,575,547
- Issue date Nov 5, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Scanning Electron Microscope
- Publication number 20210272770
- Publication date Sep 2, 2021
- Hitachi High-Tech Corporation
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION SAMPLE, ELECTRON BEAM ADJUSTMENT METHOD AND ELECTRON BE...
- Publication number 20210131801
- Publication date May 6, 2021
- Hitachi High-Technologies Corporation
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20200365364
- Publication date Nov 19, 2020
- Hitachi, Ltd
- Atsuko SHINTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE
- Publication number 20200266020
- Publication date Aug 20, 2020
- Hitachi High-Technologies Corporation
- Soichiro MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE
- Publication number 20190295805
- Publication date Sep 26, 2019
- Hitachi, Ltd
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE AND SAMPLE INSPECTION METHOD
- Publication number 20190287757
- Publication date Sep 19, 2019
- Hitachi, Ltd
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE
- Publication number 20190198284
- Publication date Jun 27, 2019
- Hitachi High-Technologies Corporation
- Soichiro MATSUNAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MEASURING PATTERNS
- Publication number 20190148108
- Publication date May 16, 2019
- Hitachi High-Technologies Corporation
- Wei SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20190074159
- Publication date Mar 7, 2019
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20190066969
- Publication date Feb 28, 2019
- Hitachi High-Technologies Corporation
- Kaori BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTION METHOD, ABERRATION CORRECTION SYSTEM, AND CHA...
- Publication number 20180190469
- Publication date Jul 5, 2018
- Hitachi High-Technologies Corporation
- Zhaohui CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND METHOD FOR CONTROLLING SAME
- Publication number 20170186583
- Publication date Jun 29, 2017
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING
Information Patent Application
CHARGED-PARTICLE-BEAM DEVICE
- Publication number 20170092459
- Publication date Mar 30, 2017
- Hitachi High-Technologies Corporation
- Noritsugu TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND DETECTION METHOD USING SAID DEVICE
- Publication number 20170053777
- Publication date Feb 23, 2017
- Hitachi High-Technologies Corporation
- Tomoyasu SHOJO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope
- Publication number 20170018394
- Publication date Jan 19, 2017
- Hitachi High-Technologies Corporation
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM DEVICE
- Publication number 20150348747
- Publication date Dec 3, 2015
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150076362
- Publication date Mar 19, 2015
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN CRITICAL DIMENSION MEASUREMENT EQUIPMENT AND METHOD FOR MEA...
- Publication number 20150041648
- Publication date Feb 12, 2015
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM EQUIPMENT
- Publication number 20150034836
- Publication date Feb 5, 2015
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SCANNING ELECTRON BEAM DEVICE AND DIMENSION MEASUREMENT METHOD USIN...
- Publication number 20140339425
- Publication date Nov 20, 2014
- Tasuku Yano
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20140299769
- Publication date Oct 9, 2014
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE
- Publication number 20130270435
- Publication date Oct 17, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...
- Publication number 20130264479
- Publication date Oct 10, 2013
- Atsuko YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope
- Publication number 20130175447
- Publication date Jul 11, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN EVALUATION METHOD, DEVICE THEREFOR, AND ELECTRON BEAM DEVICE
- Publication number 20130026361
- Publication date Jan 31, 2013
- Hitachi High-Technologies Corporation
- Hiromasa Yamanashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam Microscope
- Publication number 20120327213
- Publication date Dec 27, 2012
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND INSPECTION METHOD USING SAME
- Publication number 20120286158
- Publication date Nov 15, 2012
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE INSTRUMENT
- Publication number 20120286160
- Publication date Nov 15, 2012
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope
- Publication number 20120217393
- Publication date Aug 30, 2012
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED BEAM DEVICE
- Publication number 20110274341
- Publication date Nov 10, 2011
- Hitachi High-Technologies Corporation
- Kaori Shirahata
- G01 - MEASURING TESTING

Yasunari Sohda

Person

Patents Grantslast 30 patents

Calibration sample, electron beam adjustment method and electron be...

Inspection device

Scanning electron microscope

Electron gun and electron beam application device

Electron beam device

System and method for measuring patterns

Charged particle beam apparatus

Electron beam device and sample inspection method

Scanning electron microscope

Aberration correction method, aberration correction system, and cha...

Scanning electron microscope

Scanning electron microscope and method for controlling same

Charged-particle-beam device

Charged particle beam device and detection method using said device

Scanning electron beam device with focus adjustment based on accele...

Electron beam equipment

Pattern critical dimension measurement equipment and method for mea...

Charged-particle beam device

Charged particle beam apparatus

Charged particle beam microscope

Charged particle instrument

Method and apparatus for measuring displacement between patterns an...

Scanning electron microscope

Pattern evaluation method, device therefor, and electron beam device

Charged particle beam device

Electron microscope

Electron beam device

Scanning electron microscope

Scanning electron microscope and inspection method using same

Electron beam measurement apparatus

Patents Applicationslast 30 patents

Scanning Electron Microscope

CALIBRATION SAMPLE, ELECTRON BEAM ADJUSTMENT METHOD AND ELECTRON BE...

INSPECTION DEVICE

ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE

ELECTRON BEAM DEVICE

ELECTRON BEAM DEVICE AND SAMPLE INSPECTION METHOD

ELECTRON SOURCE AND ELECTRON BEAM IRRADIATION DEVICE

SYSTEM AND METHOD FOR MEASURING PATTERNS

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM APPARATUS

ABERRATION CORRECTION METHOD, ABERRATION CORRECTION SYSTEM, AND CHA...

SCANNING ELECTRON MICROSCOPE AND METHOD FOR CONTROLLING SAME

CHARGED-PARTICLE-BEAM DEVICE

CHARGED PARTICLE BEAM DEVICE AND DETECTION METHOD USING SAID DEVICE

Scanning Electron Microscope

CHARGED-PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM APPARATUS

PATTERN CRITICAL DIMENSION MEASUREMENT EQUIPMENT AND METHOD FOR MEA...

ELECTRON BEAM EQUIPMENT

SCANNING ELECTRON BEAM DEVICE AND DIMENSION MEASUREMENT METHOD USIN...

SCANNING ELECTRON MICROSCOPE

ELECTRON BEAM DEVICE

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...

Scanning Electron Microscope

PATTERN EVALUATION METHOD, DEVICE THEREFOR, AND ELECTRON BEAM DEVICE

Charged Particle Beam Microscope

SCANNING ELECTRON MICROSCOPE AND INSPECTION METHOD USING SAME

CHARGED PARTICLE INSTRUMENT

Electron Microscope

CHARGED BEAM DEVICE