Yasunari Souda

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pattern inspection method and pattern inspection system
- Patent number 8,217,351
- Issue date Jul 10, 2012
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and control method therefor
- Patent number 8,026,482
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method and pattern inspection system
- Patent number 7,786,437
- Issue date Aug 31, 2010
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electron beam exposure method and apparatus
- Patent number 7,126,140
- Issue date Oct 24, 2006
- Hitachi, Ltd.
- Haruo Yoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-electron beam exposure method and apparatus
- Patent number 7,067,830
- Issue date Jun 27, 2006
- Hitachi, Ltd.
- Haruo Yoda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Pattern Inspection Method and Pattern Inspection System
- Publication number 20100310180
- Publication date Dec 9, 2010
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREFOR
- Publication number 20090140143
- Publication date Jun 4, 2009
- Muneyuki FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Inspection Method and Pattern Inspection System
- Publication number 20090039261
- Publication date Feb 12, 2009
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-electron beam exposure method and apparatus
- Publication number 20060017021
- Publication date Jan 26, 2006
- Haruo Yoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multi-electron beam exposure method and apparatus
- Publication number 20040143356
- Publication date Jul 22, 2004
- Haruo Yoda
- B82 - NANO-TECHNOLOGY