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Yasunobu SUZUKI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Method for setting mounting position of target substrate and film f...
    • Patent number 10,564,634
    • Issue date Feb 18, 2020
    • Tokyo Electron Limited
    • Yasunobu Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition device and deposition method
    • Patent number 10,309,005
    • Issue date Jun 4, 2019
    • Tokyo Electron Limited
    • Yasuhiko Kojima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming system
    • Patent number 10,273,571
    • Issue date Apr 30, 2019
    • Tokyo Electron Limited
    • Yasunobu Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 9,551,060
    • Issue date Jan 24, 2017
    • Tokyo Electron Limited
    • Atsushi Gomi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
    • Publication number 20240331986
    • Publication date Oct 3, 2024
    • TOKYO ELECTRON LIMITED
    • Yasunobu SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20240117486
    • Publication date Apr 11, 2024
    • TOKYO ELECTRON LIMITED
    • Yasunobu SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR SETTING MOUNTING POSITION OF TARGET SUBSTRATE AND FILM F...
    • Publication number 20170364061
    • Publication date Dec 21, 2017
    • Yasunobu SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING SYSTEM
    • Publication number 20170159170
    • Publication date Jun 8, 2017
    • Yasunobu SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION DEVICE AND DEPOSITION METHOD
    • Publication number 20160251746
    • Publication date Sep 1, 2016
    • Tokyo Electron Limited
    • Yasuhiko KOJIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20160032446
    • Publication date Feb 4, 2016
    • TOKYO ELECTRON LIMITED
    • Atsushi GOMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...