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Yasunori EJIRI
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Toyama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Vaporizer, substrate processing apparatus, and method of manufactur...
Patent number
11,866,822
Issue date
Jan 9, 2024
Kokusai Electric Corporation
Hirohisa Yamazaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
Publication number
20230187180
Publication date
Jun 15, 2023
Kokusai Electric Corporation
Yasunori EJIRI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COOLING METHOD, A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AN...
Publication number
20220310420
Publication date
Sep 29, 2022
Kokusai Electric Corporation
Hironori SHIMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPORIZER, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTUR...
Publication number
20210079523
Publication date
Mar 18, 2021
Kokusai Electric Corporation
Hirohisa YAMAZAKI
H01 - BASIC ELECTRIC ELEMENTS