Yasunori Goto

Person

Hitachinaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method, apparatus, and program for determining condition related to...
- Patent number 12,243,711
- Issue date Mar 4, 2025
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspecting device
- Patent number 12,176,181
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 11,626,266
- Issue date Apr 11, 2023
- HITACHI HIGH-TECH CORPORATION
- Keiichiro Hitomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement device, method and display device
- Patent number 10,996,569
- Issue date May 4, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscope device and inclined hole measurement method usi...
- Patent number 10,720,307
- Issue date Jul 21, 2020
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G01 - MEASURING TESTING
Information Patent Grant
System and method for measuring patterns
- Patent number 10,692,693
- Issue date Jun 23, 2020
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay measurement method, device, and display device
- Patent number 10,094,658
- Issue date Oct 9, 2018
- Hitachi High-Technologies Corporation
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample observation device
- Patent number 9,536,700
- Issue date Jan 3, 2017
- Hitachi High-Technologies Corporation
- Yasunori Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Superposition measuring apparatus, superposition measuring method,...
- Patent number 9,390,885
- Issue date Jul 12, 2016
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting patterns
- Patent number 7,394,070
- Issue date Jul 1, 2008
- Hitachi High-Technologies Corporation
- Mari Nozoe
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor Observation System and Overlay Measurement Method
- Publication number 20240112322
- Publication date Apr 4, 2024
- HITACHI HIGH-TECH CORPORATION
- Takahiro NISHIHATA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD, APPARATUS, AND PROGRAM FOR DETERMINING CONDITION RELATED TO...
- Publication number 20230032587
- Publication date Feb 2, 2023
- HITACHI HIGH-TECH CORPORATION
- Takahiro NISHIHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTING DEVICE
- Publication number 20220359151
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD
- Publication number 20220230842
- Publication date Jul 21, 2022
- HITACHI HIGH-TECH CORPORATION
- Wei SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220130638
- Publication date Apr 28, 2022
- HITACHI HIGH-TECH CORPORATION
- Keiichiro HITOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam System and Overlay Shift Amount Measurement M...
- Publication number 20210055098
- Publication date Feb 25, 2021
- HITACHI HIGH-TECH CORPORATION
- Takuma YAMAKI
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON MICROSCOPE DEVICE AND INCLINED HOLE MEASUREMENT METHOD USI...
- Publication number 20190362933
- Publication date Nov 28, 2019
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MEASURING PATTERNS
- Publication number 20190148108
- Publication date May 16, 2019
- Hitachi High-Technologies Corporation
- Wei SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT DEVICE, METHOD AND DISPLAY DEVICE
- Publication number 20190033728
- Publication date Jan 31, 2019
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OVERLAY MEASUREMENT METHOD, DEVICE, AND DISPLAY DEVICE
- Publication number 20170322021
- Publication date Nov 9, 2017
- Hitachi High-Technologies Corporation
- Yuji TAKAGI
- G01 - MEASURING TESTING
Information Patent Application
Sample Observation Device
- Publication number 20160071688
- Publication date Mar 10, 2016
- Hitachi High-Technologies Corporation
- Yasunori GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Superposition Measuring Apparatus, Superposition Measuring Method,...
- Publication number 20160056014
- Publication date Feb 25, 2016
- Hitachi High-Technologies Corporation
- Takuma YAMAMOTO
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting patterns
- Publication number 20060163477
- Publication date Jul 27, 2006
- Hitachi High-Technologies Corporation
- Mari Nozoe
- G01 - MEASURING TESTING

Yasunori Goto

Person

Patents Grantslast 30 patents

Method, apparatus, and program for determining condition related to...

Pattern inspecting device

Charged particle beam device

Measurement device, method and display device

Electron microscope device and inclined hole measurement method usi...

System and method for measuring patterns

Overlay measurement method, device, and display device

Sample observation device

Superposition measuring apparatus, superposition measuring method,...

Method and apparatus for inspecting patterns

Patents Applicationslast 30 patents

Semiconductor Observation System and Overlay Measurement Method

METHOD, APPARATUS, AND PROGRAM FOR DETERMINING CONDITION RELATED TO...

PATTERN INSPECTING DEVICE

PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD

CHARGED PARTICLE BEAM DEVICE

Charged Particle Beam System and Overlay Shift Amount Measurement M...

ELECTRON MICROSCOPE DEVICE AND INCLINED HOLE MEASUREMENT METHOD USI...

SYSTEM AND METHOD FOR MEASURING PATTERNS

MEASUREMENT DEVICE, METHOD AND DISPLAY DEVICE

OVERLAY MEASUREMENT METHOD, DEVICE, AND DISPLAY DEVICE

Sample Observation Device

Superposition Measuring Apparatus, Superposition Measuring Method,...

Method and apparatus for inspecting patterns