Yasunori Takasugi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam observation device, electron beam observation system,...
- Patent number 11,791,130
- Issue date Oct 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Koichi Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device for imaging vias inside trenches
- Patent number 10,984,980
- Issue date Apr 20, 2021
- HITACHI HIGH-TECH CORPORATION
- Kei Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,976,536
- Issue date Apr 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Yasunori Takasugi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,665,420
- Issue date May 26, 2020
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,620,421
- Issue date Apr 14, 2020
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern measurement apparatus and defect inspection apparatus
- Patent number 10,417,756
- Issue date Sep 17, 2019
- Hitachi High-Technologies Corporation
- Kei Sakai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image-forming device, and dimension measurement device
- Patent number 10,197,783
- Issue date Feb 5, 2019
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam System
- Publication number 20230317406
- Publication date Oct 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuto KAWASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Observation Device, Electron Beam Observation System,...
- Publication number 20220051868
- Publication date Feb 17, 2022
- Hitachi High-Tech Corporation
- Koichi HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image-Forming Device, and Dimension Measurement Device
- Publication number 20200201019
- Publication date Jun 25, 2020
- Hitachi High-Technologies Corporation
- Yasunori TAKASUGI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20190295815
- Publication date Sep 26, 2019
- Hitachi High-Technologies Corporation
- Yasunori TAKASUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image-Forming Device, and Dimension Measurement Device
- Publication number 20190121113
- Publication date Apr 25, 2019
- Hitachi High-Technologies Corporation
- Yasunori TAKASUGI
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20190035600
- Publication date Jan 31, 2019
- Hitachi High-Technologies Corporation
- Kei SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Measurement Apparatus and Flaw Inspection Apparatus
- Publication number 20180012349
- Publication date Jan 11, 2018
- Hitachi High-Technologies Corporation
- Kei SAKAI
- G01 - MEASURING TESTING
Information Patent Application
Image-Forming Device, and Dimension Measurement Device
- Publication number 20150002652
- Publication date Jan 1, 2015
- Hitachi High-Technologies Corporation
- Yasunori Takasugi
- G02 - OPTICS

Yasunori Takasugi

Person

Patents Grantslast 30 patents

Electron beam observation device, electron beam observation system,...

Charged particle beam device for imaging vias inside trenches

Image-forming device, and dimension measurement device

Charged particle beam apparatus

Image-forming device, and dimension measurement device

Pattern measurement apparatus and defect inspection apparatus

Image-forming device, and dimension measurement device

Patents Applicationslast 30 patents

Charged Particle Beam System

Electron Beam Observation Device, Electron Beam Observation System,...

Image-Forming Device, and Dimension Measurement Device

Charged Particle Beam Apparatus

Image-Forming Device, and Dimension Measurement Device

Charged Particle Beam Device

Pattern Measurement Apparatus and Flaw Inspection Apparatus

Image-Forming Device, and Dimension Measurement Device