Yasunori Wada

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Chigasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Laser apparatus for generating extreme ultraviolet light
- Patent number 11,477,877
- Issue date Oct 18, 2022
- Gigaphoton Inc.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
System and method for generating extreme ultraviolet light employin...
- Patent number 10,512,148
- Issue date Dec 17, 2019
- Gigaphoton Inc.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
LASER APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20200068695
- Publication date Feb 27, 2020
- Gigaphoton Inc.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LASER APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20170196072
- Publication date Jul 6, 2017
- GIGAPHOTON INC.
- Hitoshi Nagano
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRA VIOLET LIGHT
- Publication number 20140203194
- Publication date Jul 24, 2014
- GIGAPHOTON INC.
- Hitoshi Nagano
- H01 - BASIC ELECTRIC ELEMENTS