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Yasuo Araki
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Yokohama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,397,534
Issue date
Jul 8, 2008
Nikon Corporation
Naohiko Iwata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask-holding apparatus for a light exposure apparatus and related s...
Patent number
6,888,621
Issue date
May 3, 2005
Nikon Corporation
Yasuo Araki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Exposure apparatus and device manufacturing method
Publication number
20060077368
Publication date
Apr 13, 2006
Nikon Corporation
Naohiko Iwata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask-holding apparatus for a light exposure apparatus and related s...
Publication number
20030197841
Publication date
Oct 23, 2003
Nikon Corporation
Yasuo Araki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask-holding apparatus for a light exposure apparatus and related s...
Publication number
20030179354
Publication date
Sep 25, 2003
Nikon Corporation
Yasuo Araki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY