Yasuo ASADA

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method and substrate processing system
- Patent number 11,784,054
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and apparatus
- Patent number 11,373,874
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and storage medium
- Patent number 11,342,192
- Issue date May 24, 2022
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching silicon-containing film, computer-readable storag...
- Patent number 11,189,498
- Issue date Nov 30, 2021
- Tokyo Electron Limited
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 11,011,383
- Issue date May 18, 2021
- Tokyo Electron Limited
- Yasuo Asada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 10,665,470
- Issue date May 26, 2020
- Tokyo Electron Limited
- Yasuo Asada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230124597
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method And Substrate Processing System
- Publication number 20210082710
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND APPARATUS
- Publication number 20200312669
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method and Etching Apparatus
- Publication number 20200234974
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20200105539
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method, Etching Apparatus, and Storage Medium
- Publication number 20200098575
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING SILICON-CONTAINING FILM, COMPUTER-READABLE STORAG...
- Publication number 20190355589
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Takehiko ORII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method
- Publication number 20190228981
- Publication date Jul 25, 2019
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method and Etching Apparatus
- Publication number 20190221440
- Publication date Jul 18, 2019
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- B08 - CLEANING
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20190198349
- Publication date Jun 27, 2019
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS

Yasuo ASADA

Person

Patents Grantslast 30 patents

Etching method and substrate processing system

Etching method and apparatus

Substrate processing method and storage medium

Method of etching silicon-containing film, computer-readable storag...

Etching method

Etching method and etching apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Etching Method And Substrate Processing System

ETCHING METHOD AND APPARATUS

Etching Method and Etching Apparatus

SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM

Etching Method, Etching Apparatus, and Storage Medium

METHOD OF ETCHING SILICON-CONTAINING FILM, COMPUTER-READABLE STORAG...

Etching Method

Etching Method and Etching Apparatus

ETCHING METHOD AND ETCHING APPARATUS