Yasuo Imamura

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning reaction tube and exhaustion piping system in he...
- Patent number 5,637,153
- Issue date Jun 10, 1997
- Tokyo Electron Limited
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning reaction tube
- Patent number 5,380,370
- Issue date Jan 10, 1995
- Tokyo Electron Limited
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...