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Yasuo Imanishi
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Kyoto, JP
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last 30 patents
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Patent Grant
Substrate heat-treating apparatus
Patent number
6,062,852
Issue date
May 16, 2000
Dainippon Screen Mfg. Co., Ltd.
Takanori Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus having regulated power consumption a...
Patent number
6,060,697
Issue date
May 9, 2000
Dainippon Screen Mfg. Co., Ltd.
Akihiko Morita
G05 - CONTROLLING REGULATING
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Patent Grant
Substrate processing apparatus, substrate transport apparatus and s...
Patent number
6,051,101
Issue date
Apr 18, 2000
Dainippon Screen Mfg. Co., Ltd.
Masami Ohtani
H01 - BASIC ELECTRIC ELEMENTS